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Rapid isothermal anneal of 75As implanted silicon

Description: Article discussing a study of the rapid isothermal anneal of 75As implanted silicon.
Date: November 15, 1982
Creator: Wilson, Scott R.; Gregory, R. B.; Paulson, W. M.; Hamdi, A. H. & McDaniel, Floyd Del. (Floyd Delbert), 1942-
Item Type: Article