Hydrogen terminated silicon surfaces: Development of sensors to detect metallic contaminants and stability studies under different environments
Description:
Hydrogen terminated silicon surfaces have been utilized to develop sensors for semiconductor and environmental applications. The interaction of these surfaces with different environments has also been studied in detail. The sensor assembly relevant to the semiconductor industry utilizes a silicon-based sensor to detect trace levels of metallic contaminants in hydrofluoric acid. The sensor performance with respect to two non-contaminating reference electrode systems was evaluated. In the fi…
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Date:
August 2002
Creator:
Ponnuswamy, Thomas Anand