Analyses of Particulate Contaminants in Semiconductor Processing Fluids
Description:
Particle contamination control is a critical issue for the semiconductor industry. In the near future, this industry will be concerned with the chemical identities of contaminant particles as small as 0.01 pm in size. Therefore, analytical techniques with both high chemical sensitivity and spatial resolution are required. Transmission electron microscopy (TEM) provides excellent spatial resolution and yields structural and compositional information. It is rarely used, however, due to the diffic…
more
Date:
August 1998
Creator:
Xu, Daxue