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Advanced Technology for Source Drain Resistance Reduction in Nanoscale FinFETs

Description: Dual gate MOSFET structures such as FinFETs are widely regarded as the most promising option for continued scaling of silicon based transistors after 2010. This work examines key process modules that enable reduction of both device area and fin width beyond requirements for the 16nm node. Because aggressively scaled FinFET structures suffer significantly degraded device performance due to large source/drain series resistance (RS/D), several methods to mitigate RS/D such as maximizing contact area, silicide engineering, and epitaxially raised S/D have been evaluated.
Date: May 2008
Creator: Smith, Casey Eben

Orientation, Microstructure and Pile-Up Effects on Nanoindentation Measurements of FCC and BCC Metals

Description: This study deals with crystal orientation effect along with the effects of microstructure on the pile-ups which affect the nanoindentation measurements. Two metal classes, face centered cubic (FCC) and body centered cubic (BCC, are dealt with in the present study. The objective of this study was to find out the degree of inaccuracy induced in nanoindentation measurements by the inherent pile-ups and sink-ins. Also, it was the intention to find out how the formation of pile-ups is dependant upon the crystal structure and orientation of the plane of indentation. Nanoindentation, Nanovision, scanning electron microscopy, electron dispersive spectroscopy and electron backscattered diffraction techniques were used to determine the sample composition and crystal orientation. Surface topographical features like indentation pile-ups and sink-ins were measured and the effect of crystal orientation on them was studied. The results show that pile-up formation is not a random phenomenon, but is quite characteristic of the material. It depends on the type of stress imposed by a specific indenter, the depth of penetration, the microstructure and orientation of the plane of indentation. Pile-ups are formed along specific directions on a plane and this formation as well as the pile-up height and the contact radii with the indenter is dependant on the aforesaid parameters. These pile-ups affect the mechanical properties like elastic modulus and hardness measurements which are pivotal variables for specific applications in micro and nano scale devices.
Date: May 2008
Creator: Srivastava, Ashish Kumar

Polyethylene-layered double hydroxide and montmorillonite nanocomposites: Thermal, mechanical and flame retardance properties.

Description: The effect of incorporation two clays; layered double hydroxides (LDH) and montmorillonite layered silicates (MLS) in linear low density polyethylene (PE) matrix was investigated. MLS and LDH were added of 5, 15, 30 and 60 weight percent in the PE and compounded using a Brabender. Ground pellets were subsequently compression molded. Dispersion of the clays was analyzed using optical microscopy, SEM and XRD. Both the layered clays were immiscible with the PE matrix and agglomerates formed with increased clay concentration. The thermal properties were studied by differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA). Both clays served as nucleation enhancers increasing recrystallization temperatures in the composites. Flame retarding properties were determined by using the flammability HVUL-94 system. LDH indicated better flame retarding properties than MLS for PE. The char structure was analyzed by environmental scanning electron microscopy. Mechanical properties were studied by tensile testing and Vickers microhardness testing apparatus.
Date: May 2008
Creator: Kosuri, Divya