Characterizaton of Triethoxyfluorosilane and Tetraethoxysilane Based Aerogels
Description:
Aerogels are highly porous, low dielectric constant (low k) materials being considered by the semiconductor industry as an interlayer dielectric. Low k materials are needed to overcome capacitance problems that limit device feature sizes. Precursors triethoxyfluorosilane (TEFS) and tetraethoxysilane (TEOS) were used to prepare bulk aerogels. Samples were prepared by sol-gel methods, and then carbon dioxide supercritically-dried. Effects of varying the water to precursor ratio were studied with …
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Date:
December 2001
Creator:
Roepsch, Jodi Ann
Partner:
UNT Libraries