UNT Theses and Dissertations - 13 Matching Results

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Adhesion/Diffusion Barrier Layers for Copper Integration: Carbon-Silicon Polymer Films and Tantalum Substrates

Description: The Semiconductor Industry Association (SIA) has identified the integration of copper (Cu) with low-dielectric-constant (low-k) materials as a critical goal for future interconnect architectures. A fundamental understanding of the chemical interaction of Cu with various substrates, including diffusion barriers and adhesion promoters, is essential to achieve this goal. The objective of this research is to develop novel organic polymers as Cu/low-k interfacial layers and to investigate popular barrier candidates, such as clean and modified tantalum (Ta) substrates. Carbon-silicon (C-Si) polymeric films have been formed by electron beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors on metal substrates under ultra-high vacuum (UHV) conditions. Temperature programmed desorption (TPD) studies show that polymerization is via the vinyl groups, while Auger electron spectroscopy (AES) results show that the polymerized films have compositions similar to the precursors. Films derived from vinyltrimethyl silane (VTMS) are adherent and stable on Ta substrates until 1100 K. Diffusion of deposited Cu overlayers is not observed below 800 K, with dewetting occurred only above 400 K. Hexafluorobenzene moieties can also be incorporated into the growing film with good thermal stability. Studies on the Ta substrates demonstrate that even sub-monolayer coverages of oxygen or carbide on polycrystalline Ta significantly degrade the strength of Cu/Ta chemical interactions, and affect the kinetics of Cu diffusion into bulk Ta. On clean Ta, monolayer coverages of Cu will de-wet only above 600 K. A partial monolayer of adsorbed oxygen (3L O2 at 300 K) results in a lowering of the de-wetting temperature to 500 K, while saturation oxygen coverage (10 L O2, 300 K) results in de-wetting at 300 K. Carbide formation also lowers the de-wetting temperature to 300 K. Diffusion of Cu into the Ta substrate at 1100 K occurs only after a 5-minute induction period. This induction period increases ...
Date: December 1999
Creator: Chen, Li
Partner: UNT Libraries

FT-NMR and Raman Spectroscopic Studies of Molecular Dynamics in Liquids

Description: NMR relaxation and Raman lineshape analysis are well known methods for the study of molecular reorientational dynamics in liquids. The combination of these two methods provides another approach to tackle the characterization of molecular dynamics in liquids. Investigations presented here include (1) NMR relaxation study of polycyclic compounds in solution, (2) the study of nitromethane reorientational dynamics using the NMR and Raman methods, and (3) Raman lineshape analysis of reorientation hexafluorobenzene/benzene mixtures.
Date: December 1993
Creator: Wang, Kuen-Shian
Partner: UNT Libraries

A Materials Approach to Silicon Wafer Level Contamination Issues from the Wet Clean Process

Description: Semiconductor devices are built using hyperpure silicon and very controlled levels of doping to create desired electrical properties. Contamination can alter these precisely controlled electrical properties that can render the device non-functional or unreliable. It is desirable to determine what impurities impact the device and control them. This study consists of four parts: a) determination of acceptable SCI (Standard Clean 1) bath contamination levels using VPD-DSE-GFAAS (Vapor Phase Decomposition Droplet Surface Etching Graphite Furnace Atomic Absorption Spectroscopy), b) copper deposition from various aqueous HF solutions, c) anion contamination from fluoropolymers used in chemical handling and d) metallic contamination from fluoropolymers and polyethylene used in chemical handling. A technique was developed for the determination of metals on a silicon wafer source at low levels. These levels were then correlated to contamination levels in a SCI bath. This correlation permits the determination of maximum permissible solution contaminant levels. Copper contamination is a concern for depositing on the wafer surface from hydrofluoric acid solutions. The relationship between copper concentration on the wafer surface and hydrofluoric acid concentration was determined. An inverse relationship exists and was explained by differences in diffusion rates between the differing copper species existing in aqueous hydrofluoric acid solutions. Finally, sources of contamination from materials used in chemical handling was studied. The predominant anion contamination from fluoropolymers was found to be fluorides. Metallic contamination from fluoropolymers and polyethylene was also studied. The primary metal contamination comes from the actual fabrication of the polymer and not from the polymer resin.
Date: December 1996
Creator: Hall, Lindsey H. (Lindsey Harrison)
Partner: UNT Libraries

Preparation and Stereochemistry of Reactive Intermediates Containing a Silicon-Carbon Double Bond

Description: 1,1-Dimethyl-2-neopentylsilene reacted with the N-methylimine of benzophenone to give 1,2,2-trimethyl-3- neopentyl-4,4-diphenyl-l-aza-2-silacyclobutane, I, and 2,3,4,4a-tetrahydro-2,3,3-trimethyl-1-phenyl-4-neopentyl-2- aza-3-silanephthalene, II, in 35% and 20% yields, respectively. Compounds I and II did not serve as thermal silene precursors. Heating I and II to over 280°C did not yield 1,3-disilacyclobutanes. In the presence of 2,3- dimethyl-1,3-butadiene typical silene products were not obtained. However, I and II reacted rapidly with methanol at room temperature to give the ring-opened products (E)-2- methoxy-2,5,5-trimethyl-2-silahex-3-ene, III, 1,1- diphenyldimethylamine, IV, and 2-methoxy-2,5,5-trimethyl-3- (N-methylaminodiphenyl) methyl-2-silahexane, V.
Date: December 1991
Creator: Uang, Shinian
Partner: UNT Libraries

Raman and NMR Investigation of Molecular Reorientation and Internal Rotation in Liquids

Description: Molecular rotational motions are known to influence both Raman scattering of light and nuclear spin relaxation. Therefore, the application of Raman bandshape analysis and NMR relaxation time measurements to probe molecular dynamics in liquids will provide us with a deeper understanding of the dynamical behavior and structure of molecules in the liquid phase. Presented here are (i) studies of molecular reorientation of acetonitrile in the neat liquid phase and in solution by Raman bandshape analysis and NMR relaxation; (ii) studies of reorientational dynamics and internal rotation in transition metal clusters by NMR relaxation.
Date: December 1991
Creator: Yuan, Peng
Partner: UNT Libraries

Solution Studies of the Structures and Stability of Mixed Lithium Alkoxide/Alkvllithium Aggregates

Description: New one- and two-dimensional NMR techniques were used to elucidate the solution structures of these complex mixtures. The system, lithium tert-butoxide/tert-butyllithium, was studied as a model system with O/Li ratios varying from 0/1 to 1/1. It was found that at low O/Li ratios, a single mixed tetrameric aggregate was formed. At higher O/Li ratios, mixed hexameric species were formed. Two other systems, lithium isopropoxide/iso-propyllithium and lithium n-propoxide/n-propyllithium were also studied at low O/Li ratios.
Date: December 1992
Creator: DeLong, George T. (George Thomas)
Partner: UNT Libraries

Solvent and Ionic Complexes of the Calix[6]arenes

Description: One of the more attractive attributes of calixarenes is their wide variety of possible conformations and hence cavity shapes. However, the flexibility that allows this long-range benefit gives rise to major synthetic challenges when working with the larger members of the family. O-alkylations have proven to be the most widely employed synthetic routes to "functionalization" of the calixarenes, and these have shown a dependence upon both solvent and the metal ions present. Surprisingly, there have been no structural data presented concerning the complexes between the simple unsubstituted calix[6]arenes and the metal ions of groups 1 and 2. The structures of four complexes, containing cesium, rubidium, and calcium are reported as determined by X-ray crystallography. The solution behavior of the complexes for both representative groups is also discussed, in particular with regard to conformational stabilization of the calix[6]arenes and the role of solvent upon this stabilization. These complexes are also investigated as starting materials for the selective functionalization of the calix[6]arenes.
Date: December 1997
Creator: Wolfgong, William J.
Partner: UNT Libraries

Structural Elucidation of tert-Butyllithium/Lithium Alkoxide and Lithium Hydride/Lithium Alkoxide Mixed Aggregates

Description: The effects of lithium alkoxides on the rates of reactions and on the structures of a series of tert-butyllithium/lithium alkoxide mixed aggregates were studied, where the alkoxides were iso-butoxide, tert-butoxide and menthoxide. It was found that their effects depend not only on their amount present, but also on their steric bulk. The tert-butyllithium/lithium alkoxide mixed aggregates were exposed to UV light or heat to form lithium hydride/lithium alkoxide mixed aggregates. The aggregation states were assigned from either 13C-6Li coupling or a new technique based on the relative intensity of NMR peaks using different nuclei. The compounds formed depend upon the method of formation and the alkoxide. The unique properties of the lithium hydride/lithium alkoxide mixed aggregates are their high solubility in hydrocarbon solutions, very reactive bases, showing 6Li-1H couplings, and having only one hydride ion per aggregate. Their formation, reactivity, solubility, and aggregation states were found to depend on the size of lithium alkoxides. X-ray crystal structures of lithium tert-butoxide and lithium menthoxide were also studied and found to be hexameric.
Date: December 1997
Creator: Nguyen, Hanh D.
Partner: UNT Libraries

Substitution Chemistry of the Cobalt Complexes [Co₂(CO)₆(PhC≡CR) (R=Ph, H) and PhCCo₃(CO)₉] with the Diphosphine Ligands [Bis(diphenylphosphino)maleic Anhydride (BMA) and (Z)-Ph₂PCH=CHPPh₂]. Reversible Chelate-to-Bridge Diphosphine Ligand Exchange, Phosphorus-Carbon Bond Cleavage and Phosphorus-Carbon Bond Formation

Description: The tricobalt cluster PhCCo3(CO)9 (1) reacts with the bidentate phosphine ligand 2,3-bis(diphenylphosphino)maleic anhydride (bma) in the presence of added Me3NO to give the diphosphine-substituted cluster PhCCo3(CO)7(bma) (2). Cluster 2 is unstable in solution, readily losing CO to afford Co3(CO)6[(μ2-η2/η1-C(Ph)C=C(PPh2)C(O)OC(O)](μ2-PPh2) (3) as the sole observed product. VT-31P NMR measurements on cluster 2 indicate that the bma ligand functions as both a chelating and a bridging ligand. At -97 °C, 31P NMR analysis of 2 reveals a Keq of 5.7 in favor of the bridging isomer. The bridged bma cluster 2 is the only observed species above -50°C. The solid-state structure of 2 does not correspond to the major bridging isomer observed in solution but rather the minor chelating isomer. The conversion of 2 to 3 followed first-order kinetics, with the reaction rates being independent of the nature of the reaction solvent and strongly suppressed by added CO, supporting a dissociative loss of CO as the rate-determining step. The activation parameters for CO loss were determined to be ΔH≠ = 29.9 ± 2.2 kcal/mol and ΔS≠ = 21.6 ± 6 eu.
Date: December 1994
Creator: Yang, Kaiyuan
Partner: UNT Libraries

Surface and Interfacial Studies of Metal-Organic Chemical Vapor Deposition of Copper

Description: The nucleation and successful growth of copper (Cu) thin films on diffusion barrier/adhesion promoter substrates during metal-organic chemical vapor deposition (MOCVD) are strongly dependent on the initial Cu precursor-substrate chemistry and surface conditions such as organic contamination and oxidation. This research focuses on the interactions of bis(1,1,1,5,5,5-hexafluoroacetylacetonato)copper(II), [Cu(hfac)2], with polycrystalline tantalum (Ta) and polycrystalline as well as epitaxial titanium nitride (TiN) substrates during Cu MOCVD, under ultra-high vacuum (UHV) conditions and low substrate temperatures (T < 500 K). The results obtained from X-ray photoelectron spectroscopy (XPS), Auger Electron Spectroscopy (AES) and Temperature Programmed Desorption (TPD) measurements indicate substantial differences in the chemical reaction pathways of metallic Cu formation from Cu(hfac)2 on TiN versus Ta surfaces.
Date: December 1997
Creator: Nuesca, Guillermo M.
Partner: UNT Libraries

The Synthesis and Chemistry of Polyciclic Cage Compounds

Description: Chapter I describes the synthesis of a trishomocubyl helical tubuland diol and some aspects of its inclusion chemistry. Thus, all three isomers of 4,7-dimethylpentacyclo[6.3.0.0^2,6.0^3,10.0^5,9]undecane-4,7-diol have been prepared and their X-ray structures have been determined. The syn,syn-isomer crystallizes in a double-stranded hydrogen-bonded lattice, while anti,syn-isomer forms a hydrogen-bonded layer lattice. In contrast, the anti,anti-isomer is a new member of the helical tubuland diol host family; its crystal lattice consists of parallel canals with a trefoil-shaped cross-section of area 25.4 Å^2. Chapter II describes the synthesis of new molecular clefts. These molecular clefts have been synthesized via base-promoted reactions of 3,6-diaryl-l,2,4,5-tetrazines with tetracyclo[6.3.0.0^4,11.0^5,9]undecane-3,6-dione and with tricyclo[6.3.0.0^2,6]undecane-3,11-dione, respectively. Compounds of this type are of interest as a potential new class of host molecules for use in host-guest complexation studies. Chapter III reports the synthesis of stereospecifically deuterated spiro(oxetane-3,8'-pentacyclo[5.4.0.0^2,6.0^3,10.0^5,9]undecanes) and their acid-promoted ring opening and concomitant rearrangements. The deuterium-containing reaction products have been characterized via analysis of their NMR and mass spectra. The results strongly suggest that intramolecular 1,5-hydride shifts provide an important pathway through which the acid promoted rearrangements occur. Chapter IV reports the oxidation of heptacyclo-[6.6.0.0^2,6.0^3,13.0^4,11.0^5,9.0^10,14] tetradecane (HCTD) via application of Barton's "GoAgg" systems. The products have been characterized by NMR and mass spectral analysis. Under GoAgg^v conditions, oxidation of HCTD proceeds to afford heptacyclo [6.6.0.0^2,6.0^3,13.0^4,11.0^5,9.0^10,14]tetradecan-7-one in 1% yield.
Date: December 1994
Creator: Wang, Yanjun
Partner: UNT Libraries