Single Reflective Optical Element for Interference Lithography

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Description

Patent relating to optical elements for use in interference lithography.

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15 p. : ill.

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Lin, Yuankun; Lutkenhaus, Jeffrey & George, David December 20, 2016.

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This patent is part of the collection entitled: UNT Scholarly Works and was provided by UNT College of Arts and Sciences to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 12 times . More information about this patent can be viewed below.

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Description

Patent relating to optical elements for use in interference lithography.

Physical Description

15 p. : ill.

Notes

Abstract: A single reflective optical element is constructed for use in interference lithography. The single reflective optical element is generally made up of at least two, and preferably four, polished reflective strips arranged to have particular angles relative to a laser beam passing through the optical element. A laser beam passing through the optical element will be partially reflected by the reflective strips to generate additional linearly polarized beams. The additional reflected beams overlap with the central laser beam and form an interference pattern as the beams pass out of the optical element. The generated polarized beams and interference pattern can be directed onto a photosensitive material to produce photonic crystals or photonic crystal templates.

Prior Publication Data: US 2015/0043059 A1, Feb. 12, 2015

Related U.S. Application Data; Provisional application No. 61/863,343, filed on Aug. 7, 2013.

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  • August 1, 2014

Accepted Date

  • December 20, 2016

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  • December 20, 2016

Added to The UNT Digital Library

  • Aug. 29, 2017, 9:38 a.m.

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Lin, Yuankun; Lutkenhaus, Jeffrey & George, David. Single Reflective Optical Element for Interference Lithography, patent, December 20, 2016; Washington, D.C.. (digital.library.unt.edu/ark:/67531/metadc991039/: accessed July 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT College of Arts and Sciences.