Structure and Low-temperature Tribology of Lubricious Nanocrystalline ZnO/Al2O3 Nanolaminates and ZrO2 Monofilms Grown by Atomic Layer Deposition

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Currently available solid lubricants only perform well under a limited range of environmental conditions. Unlike them, oxides are thermodynamically stable and relatively inert over a broad range of temperatures and environments. However, conventional oxides are brittle at normal temperatures; exhibiting significant plasticity only at high temperatures (>0.5Tmelting). This prevents oxides' use in tribological applications at low temperatures. If oxides can be made lubricious at low temperatures, they would be excellent solid lubricants for a wide range of conditions. Atomic layer deposition (ALD) is a growth technique capable of depositing highly uniform and conformal films in challenging applications that have buried ... continued below

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Romanes, Maia Castillo December 2008.

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  • Romanes, Maia Castillo

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Currently available solid lubricants only perform well under a limited range of environmental conditions. Unlike them, oxides are thermodynamically stable and relatively inert over a broad range of temperatures and environments. However, conventional oxides are brittle at normal temperatures; exhibiting significant plasticity only at high temperatures (>0.5Tmelting). This prevents oxides' use in tribological applications at low temperatures. If oxides can be made lubricious at low temperatures, they would be excellent solid lubricants for a wide range of conditions. Atomic layer deposition (ALD) is a growth technique capable of depositing highly uniform and conformal films in challenging applications that have buried surfaces and high-aspect-ratio features such as microelectromechanical (MEMS) devices where the need for robust solid lubricants is sometimes necessary. This dissertation investigates the surface and subsurface characteristics of ALD-grown ZnO/Al2O3 nanolaminates and ZrO2 monofilms before and after sliding at room temperature. Significant enhancement in friction and wear performance was observed for some films. HRSEM/FIB, HRTEM and ancillary techniques (i.e. SAED, EELS) were used to determine the mechanisms responsible for this enhancement. Contributory characteristics and energy dissipation modes were identified that promote low-temperature lubricity in both material systems.

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  • December 2008

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  • Sept. 9, 2009, 2:31 p.m.

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  • Oct. 6, 2009, 5:01 p.m.

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Romanes, Maia Castillo. Structure and Low-temperature Tribology of Lubricious Nanocrystalline ZnO/Al2O3 Nanolaminates and ZrO2 Monofilms Grown by Atomic Layer Deposition, dissertation, December 2008; Denton, Texas. (digital.library.unt.edu/ark:/67531/metadc9741/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; .