Effects of electron current and collisional interactions in inductively coupled plasma (ICP) reactors

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In continuum modeling of low pressure plasma discharges, electron collisional interaction terms are modeled using collision frequencies based on electron temperature. However, this becomes inaccurate in ICP reactors where the directed azimuthal electron velocity can become comparable to the electron thermal velocity, significantly altering electron transport properties and the azimuthal current and electric field relationship. By retaining the directed relative velocities in the collision integrals for multi-temperature mixtures, we have derived necessary corrections for plasma conductivity. Computational results of an argon discharge (10 mTorr) show that these corrections result in increased collision frequencies, leading to increased total power deposition of ... continued below

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24 p.

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Chang, Chong H. (Chong H.) & Bose, D. (Deepak) January 1, 2002.

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In continuum modeling of low pressure plasma discharges, electron collisional interaction terms are modeled using collision frequencies based on electron temperature. However, this becomes inaccurate in ICP reactors where the directed azimuthal electron velocity can become comparable to the electron thermal velocity, significantly altering electron transport properties and the azimuthal current and electric field relationship. By retaining the directed relative velocities in the collision integrals for multi-temperature mixtures, we have derived necessary corrections for plasma conductivity. Computational results of an argon discharge (10 mTorr) show that these corrections result in increased collision frequencies, leading to increased total power deposition of about 10 % at 500 W in a 300 mm TCP reactor, for a constant inductive coil current. This increase is expected to be significant at high powers and low pressures. A correction of electrical conductivity also results in significant changes in both electric field and current density in the azimuthal direction.

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24 p.

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  • Submitted to: 55th Annual Gaseous Electronics Conference, Minneapolis, MN, Oct. 15-18, 2002

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  • Report No.: LA-UR-02-6196
  • Grant Number: none
  • Office of Scientific & Technical Information Report Number: 976360
  • Archival Resource Key: ark:/67531/metadc935396

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  • January 1, 2002

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  • Nov. 13, 2016, 7:26 p.m.

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  • Dec. 9, 2016, 11:23 p.m.

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Chang, Chong H. (Chong H.) & Bose, D. (Deepak). Effects of electron current and collisional interactions in inductively coupled plasma (ICP) reactors, article, January 1, 2002; United States. (digital.library.unt.edu/ark:/67531/metadc935396/: accessed November 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.