High quality ZnO:Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition

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Aluminum-doped zinc oxide, ZnO:Al or AZO, is a well-known n-type transparent conducting oxide with great potential in a number of applications currently dominated by indium tin oxide (ITO). In this study, the optical and electrical properties of AZO thin films deposited on glass and silicon by pulsed filtered cathodic arc deposition are systematically studied. In contrast to magnetron sputtering, this technique does not produce energetic negative ions, and therefore ion damage can be minimized. The quality of the AZO films strongly depends on the growth temperature while only marginal improvements are obtained with post-deposition annealing. The best films, grown at ... continued below

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34

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Anders, Andre; Lim, Sunnie H.N.; Yu, Kin Man; Andersson, Joakim; Rosen, Johanna; McFarland, Mike et al. April 24, 2009.

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Aluminum-doped zinc oxide, ZnO:Al or AZO, is a well-known n-type transparent conducting oxide with great potential in a number of applications currently dominated by indium tin oxide (ITO). In this study, the optical and electrical properties of AZO thin films deposited on glass and silicon by pulsed filtered cathodic arc deposition are systematically studied. In contrast to magnetron sputtering, this technique does not produce energetic negative ions, and therefore ion damage can be minimized. The quality of the AZO films strongly depends on the growth temperature while only marginal improvements are obtained with post-deposition annealing. The best films, grown at a temperature of about 200?C, have resistivities in the low to mid 10-4 Omega cm range with a transmittance better than 85percent in the visible part of the spectrum. It is remarkable that relatively good films of small thickness (60 nm) can be fabricated using this method.

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34

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  • Journal Name: Thin Solid Films

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  • Report No.: LBNL-1881E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 961835
  • Archival Resource Key: ark:/67531/metadc934949

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  • April 24, 2009

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  • Nov. 13, 2016, 7:26 p.m.

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  • Jan. 4, 2017, 3:25 p.m.

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Anders, Andre; Lim, Sunnie H.N.; Yu, Kin Man; Andersson, Joakim; Rosen, Johanna; McFarland, Mike et al. High quality ZnO:Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition, article, April 24, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc934949/: accessed September 25, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.