Nanoporous films for epitaxial growth of single crystal semiconductor materials : final LDRD report.

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This senior council Tier 1 LDRD was focused on exploring the use of porous growth masks as a method for defect reduction during heteroepitaxial crystal growth. Initially our goal was to investigate porous silica as a growth mask, however, we expanded the scope of the research to include several other porous growth masks on various size scales, including mesoporous carbon, photolithographically patterned SU-8 and carbonized SU-8 structures. Use of photolithographically defined growth templates represents a new direction, unique in the extensive literature of patterned epitaxial growth, and presents the possibility of providing a single step growth mask. Additional research included ... continued below

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20 p.

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Rowen, Adam M.; Koleske, Daniel David; Fan, Hongyou; Brinker, C. Jeffrey; Burckel, David Bruce; Williams, John Dalton et al. October 1, 2007.

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Description

This senior council Tier 1 LDRD was focused on exploring the use of porous growth masks as a method for defect reduction during heteroepitaxial crystal growth. Initially our goal was to investigate porous silica as a growth mask, however, we expanded the scope of the research to include several other porous growth masks on various size scales, including mesoporous carbon, photolithographically patterned SU-8 and carbonized SU-8 structures. Use of photolithographically defined growth templates represents a new direction, unique in the extensive literature of patterned epitaxial growth, and presents the possibility of providing a single step growth mask. Additional research included investigation of pore viability via electrochemical deposition into high aspect ratio photoresist. This project was a small footprint research effort which, nonetheless, produced significant progress towards both the stated goal as well as unanticipated research directions.

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20 p.

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  • Report No.: SAND2007-6409
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/966925 | External Link
  • Office of Scientific & Technical Information Report Number: 966925
  • Archival Resource Key: ark:/67531/metadc934747

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • October 1, 2007

Added to The UNT Digital Library

  • Nov. 13, 2016, 7:26 p.m.

Description Last Updated

  • Dec. 6, 2016, 1:47 p.m.

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Rowen, Adam M.; Koleske, Daniel David; Fan, Hongyou; Brinker, C. Jeffrey; Burckel, David Bruce; Williams, John Dalton et al. Nanoporous films for epitaxial growth of single crystal semiconductor materials : final LDRD report., report, October 1, 2007; United States. (digital.library.unt.edu/ark:/67531/metadc934747/: accessed October 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.