Inspection 13.2 nm table-top full-field microscope

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We present results on a table-top microscope that uses an EUV stepper geometry to capture full-field images with a halfpitch spatial resolution of 55 nm. This microscope uses a 13.2 nm wavelength table-top laser for illumination and acquires images of reflective masks with exposures of 20 seconds. These experiments open the path to the realization of high resolution table-top imaging systems for actinic defect characterization.

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Brizuela, F.; Wang, Y.; Brewer, C. A.; Pedaci, F.; Chao, W.; Anderson, E. H. et al. February 23, 2009.

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We present results on a table-top microscope that uses an EUV stepper geometry to capture full-field images with a halfpitch spatial resolution of 55 nm. This microscope uses a 13.2 nm wavelength table-top laser for illumination and acquires images of reflective masks with exposures of 20 seconds. These experiments open the path to the realization of high resolution table-top imaging systems for actinic defect characterization.

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7

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  • SPIE Advanced Lithography 2009, San Jose, CA, FEb. 25 - March 3, 2007

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  • Report No.: LBNL-1745E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 951769
  • Archival Resource Key: ark:/67531/metadc934308

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Office of Scientific & Technical Information Technical Reports

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  • February 23, 2009

Added to The UNT Digital Library

  • Nov. 13, 2016, 7:26 p.m.

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  • Oct. 2, 2017, 5:05 p.m.

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Brizuela, F.; Wang, Y.; Brewer, C. A.; Pedaci, F.; Chao, W.; Anderson, E. H. et al. Inspection 13.2 nm table-top full-field microscope, article, February 23, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc934308/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.