Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy

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To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond.

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Chao, W.; Kim, J.; Rekawa, S.; Fischer, P. & Anderson, E. H. June 5, 2009.

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To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond.

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  • Journal Name: Optics Express

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  • Report No.: LBNL-2408E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 971842
  • Archival Resource Key: ark:/67531/metadc933983

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  • June 5, 2009

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  • Nov. 13, 2016, 7:26 p.m.

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  • Oct. 2, 2017, 12:37 p.m.

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Chao, W.; Kim, J.; Rekawa, S.; Fischer, P. & Anderson, E. H. Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy, article, June 5, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc933983/: accessed October 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.