Collecting EUV mask images through focus by wavelength tuning

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Using an extreme-ultraviolet (EUV) microscope to produce high-quality images of EUV reticles, we have developed a new wavelength tuning method to acquire through-focus data series with a higher level of stability and repeatability than was previously possible. We utilize the chromatic focal-length dependence of a diffractive Fresnel zoneplate objective lens, and while holding the mask sample mechanically still, we tune the wavelength through a narrow range, in small steps. In this paper, we demonstrate the method and discuss the relative advantages that this data collection technique affords.

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Goldberg, Kenneth A.; Mochi, Iacopo & Huh, Sungmin February 23, 2009.

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Using an extreme-ultraviolet (EUV) microscope to produce high-quality images of EUV reticles, we have developed a new wavelength tuning method to acquire through-focus data series with a higher level of stability and repeatability than was previously possible. We utilize the chromatic focal-length dependence of a diffractive Fresnel zoneplate objective lens, and while holding the mask sample mechanically still, we tune the wavelength through a narrow range, in small steps. In this paper, we demonstrate the method and discuss the relative advantages that this data collection technique affords.

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  • SPIE advanced lithography 2009, San Jose, CA, February 22-27, 2009

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  • Report No.: LBNL-1622E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 949973
  • Archival Resource Key: ark:/67531/metadc933034

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  • February 23, 2009

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  • Nov. 13, 2016, 7:26 p.m.

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  • Oct. 2, 2017, 11:45 a.m.

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Goldberg, Kenneth A.; Mochi, Iacopo & Huh, Sungmin. Collecting EUV mask images through focus by wavelength tuning, article, February 23, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc933034/: accessed December 11, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.