Ultra-high Resolution Optics for EUV and Soft X-ray Inelastic Scattering

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We describe a revolutionary new approach to high spectral resolution soft x-ray optics. Conventionally in the soft x-ray energy range, high spectral resolution is obtained by use of a relatively low line density grating operated in 1st order with small slits. This severely limits throughput. This limitation can be removed by use of a grating either in very high order, or with very high line density, if one can maintain high diffraction efficiency. We have developed a new technology for achieving both of these goals which should allow high throughput spectroscopy, at resolving powers of up to 106 at 1 ... continued below

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Voronov, Dmitry L.; Cambie, Rossana; Ahn, Minseung; Anderson, Erik H.; Chang, Chih-Hao; Gullikson, Eric M. et al. September 16, 2009.

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We describe a revolutionary new approach to high spectral resolution soft x-ray optics. Conventionally in the soft x-ray energy range, high spectral resolution is obtained by use of a relatively low line density grating operated in 1st order with small slits. This severely limits throughput. This limitation can be removed by use of a grating either in very high order, or with very high line density, if one can maintain high diffraction efficiency. We have developed a new technology for achieving both of these goals which should allow high throughput spectroscopy, at resolving powers of up to 106 at 1 keV. Such optics should provide a revolutionary advance for high resolution lifetime free spectroscopy, such as RIXS, and for pulse compression of chirped beams. We report recent developmental fabrication and characterization of a prototype grating optimized for 14.2 nm EUV light. The prototype grating with a 200 nm period of the blazed grating substrate coated with 20 Mo/Si bilayers with a period of 7.1 nm demonstrates good dispersion in the third order (effective groove density of 15,000 lines per mm) with a diffraction efficiency of more than 33percent.

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  • SRI2009 - The 10th International Conference on Synchrotron Radiation Instrumentation, Melbourne, Victoria, Australia., September 27 - October 2, 2009

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  • Report No.: LBNL-2644E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 973692
  • Archival Resource Key: ark:/67531/metadc932109

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  • September 16, 2009

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  • Nov. 13, 2016, 7:26 p.m.

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  • Jan. 4, 2017, 4:53 p.m.

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Voronov, Dmitry L.; Cambie, Rossana; Ahn, Minseung; Anderson, Erik H.; Chang, Chih-Hao; Gullikson, Eric M. et al. Ultra-high Resolution Optics for EUV and Soft X-ray Inelastic Scattering, article, September 16, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc932109/: accessed November 13, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.