Binary Pseudo-Random Gratings and Arrays for Calibration of Modulation Transfer Function of Surface Profilometers

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In the present work, we describe application of binary pseudo-random gratings (BPRG) and arrays (BPRA) as effective 1D and 2D test surfaces suitable for calibration of different surface profilometers, including a number of interferometric microscopes and scatterometers.

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Barber, Samuel K.; Anderson, Erik D.; Cambie, Rossana; McKinney, Wayne R.; Takacs, Peter Z.; Stover, John C. et al. June 17, 2009.

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Description

In the present work, we describe application of binary pseudo-random gratings (BPRG) and arrays (BPRA) as effective 1D and 2D test surfaces suitable for calibration of different surface profilometers, including a number of interferometric microscopes and scatterometers.

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3

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  • INTERNATIONAL WORKSHOP ON X-RAY MIRROR DESIGN, FABRICATION, AND METROLOGY, Osaka University, Japan, September 22 - 24, 2009

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  • Report No.: LBNL-2033E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 962708
  • Archival Resource Key: ark:/67531/metadc931316

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  • June 17, 2009

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  • Nov. 13, 2016, 7:26 p.m.

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  • Jan. 4, 2017, 4:45 p.m.

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Barber, Samuel K.; Anderson, Erik D.; Cambie, Rossana; McKinney, Wayne R.; Takacs, Peter Z.; Stover, John C. et al. Binary Pseudo-Random Gratings and Arrays for Calibration of Modulation Transfer Function of Surface Profilometers, article, June 17, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc931316/: accessed January 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.