Self-sputtering far above the runaway threshold: an extraordinary metal ion generator

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When self-sputtering is driven far above the runaway threshold voltage, energetic electrons are made available to produce"excess plasma" far from the magnetron target. Ionization balance considerations show that the secondary electrons deliver the necessary energy to the"remote" zone. Thereby, such a system can be an extraordinarily prolific generator of useable metal ions. Contrary to other known sources, the ion current to a substrate can exceed the discharge current. For gasless self-sputtering of copper, the useable ion current scales exponentially with the discharge voltage.

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Andersson, Joakim & Anders, Andre December 16, 2008.

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When self-sputtering is driven far above the runaway threshold voltage, energetic electrons are made available to produce"excess plasma" far from the magnetron target. Ionization balance considerations show that the secondary electrons deliver the necessary energy to the"remote" zone. Thereby, such a system can be an extraordinarily prolific generator of useable metal ions. Contrary to other known sources, the ion current to a substrate can exceed the discharge current. For gasless self-sputtering of copper, the useable ion current scales exponentially with the discharge voltage.

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16

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  • Journal Name: Physical Review Letters; Journal Volume: 102; Related Information: Journal Publication Date: 2009

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  • Report No.: LBNL-1641E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 950216
  • Archival Resource Key: ark:/67531/metadc927020

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Office of Scientific & Technical Information Technical Reports

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  • December 16, 2008

Added to The UNT Digital Library

  • Nov. 13, 2016, 7:26 p.m.

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  • Jan. 4, 2017, 3:26 p.m.

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Andersson, Joakim & Anders, Andre. Self-sputtering far above the runaway threshold: an extraordinary metal ion generator, article, December 16, 2008; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc927020/: accessed October 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.