High sensitivity resonance frequency measurements of individualmicro-cantilevers using fiber optical interferometry

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We describe a setup for the resonance frequency measurement of individual microcantilevers. The setup displays both high spatial selectivity and sensitivity to specimen vibrations by utilizing a tapered uncoated fiber tip. The high sensitivity to specimen vibrations is achieved by the combination of optical Fabry-Perot interferometry and narrow band RF detection. Wave fronts reflected on the specimen and on the fiber tip end face interfere, thus no reference plane on the specimen is needed, as demonstrated with the example of freestanding silicon nitride micro-cantilevers. The resulting system is integrated in a DB-235 dual beam FIB system, thereby allowing the measurement ... continued below

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Duden, Thomas & Radmilovic, Velimir March 4, 2009.

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We describe a setup for the resonance frequency measurement of individual microcantilevers. The setup displays both high spatial selectivity and sensitivity to specimen vibrations by utilizing a tapered uncoated fiber tip. The high sensitivity to specimen vibrations is achieved by the combination of optical Fabry-Perot interferometry and narrow band RF detection. Wave fronts reflected on the specimen and on the fiber tip end face interfere, thus no reference plane on the specimen is needed, as demonstrated with the example of freestanding silicon nitride micro-cantilevers. The resulting system is integrated in a DB-235 dual beam FIB system, thereby allowing the measurement of micro-cantilever responses during observation in SEM mode. The FIB was used to modify the optical fiber tip. At this point of our RF system development, the microcantilevers used to characterize the detector were not modified in situ.

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  • Journal Name: Review of Scientific Instruments

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  • Report No.: LBNL-780E-Rev
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 949775
  • Archival Resource Key: ark:/67531/metadc926255

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Office of Scientific & Technical Information Technical Reports

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  • March 4, 2009

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  • Nov. 13, 2016, 7:26 p.m.

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  • Oct. 2, 2017, 5:04 p.m.

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Duden, Thomas & Radmilovic, Velimir. High sensitivity resonance frequency measurements of individualmicro-cantilevers using fiber optical interferometry, article, March 4, 2009; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc926255/: accessed November 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.