Performance of a MEMS-base Adaptive Optics Optical Coherency Tomography System

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We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of ... continued below

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8 p. (0.3 MB)

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Evans, J; Zadwadzki, R J; Jones, S; Olivier, S; Opkpodu, S & Werner, J S January 16, 2008.

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We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

Physical Description

8 p. (0.3 MB)

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PDF-file: 8 pages; size: 0.3 Mbytes

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  • Presented at: Photonics West: MOEMS-MEMS 2008, San Jose, CA, United States, Jan 19 - Jan 24, 2008

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  • Report No.: LLNL-PROC-400977
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 944337
  • Archival Resource Key: ark:/67531/metadc902480

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  • January 16, 2008

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  • Sept. 27, 2016, 1:39 a.m.

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  • April 17, 2017, 1:35 p.m.

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Evans, J; Zadwadzki, R J; Jones, S; Olivier, S; Opkpodu, S & Werner, J S. Performance of a MEMS-base Adaptive Optics Optical Coherency Tomography System, article, January 16, 2008; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc902480/: accessed November 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.