Progress in short period multilayer coatings for water windowapplications

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Absolute photoionization cross-section measurements for amixture of ground and metastable states of Xe4+, Xe5+, and Xe6+ arereported in the photon energy range of 4d-nf transitions, which occurwithin or adjacent to the 13.5 nm window for extreme ultravioletlithography light source development. The reported values allow thequantification of opacity effects in xenon plasmas due to these 4d-4fautoionizing states. The oscillator strengths for the 4d-4f and 4d-5ftransitions in Xeq+ (q=1-6) ions are calculated using nonrelativisticHartree-Fock and random phase approximations. These are compared withpublished experimental values for Xe+ to Xe3+ and with the valuesobtained from the present experimental cross-section measurements forXe4+ to Xe6+. The ... continued below

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Gullikson, E.M.; Salmassi, F.; Aquila, A.L. & Dollar, F. May 20, 2006.

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Absolute photoionization cross-section measurements for amixture of ground and metastable states of Xe4+, Xe5+, and Xe6+ arereported in the photon energy range of 4d-nf transitions, which occurwithin or adjacent to the 13.5 nm window for extreme ultravioletlithography light source development. The reported values allow thequantification of opacity effects in xenon plasmas due to these 4d-4fautoionizing states. The oscillator strengths for the 4d-4f and 4d-5ftransitions in Xeq+ (q=1-6) ions are calculated using nonrelativisticHartree-Fock and random phase approximations. These are compared withpublished experimental values for Xe+ to Xe3+ and with the valuesobtained from the present experimental cross-section measurements forXe4+ to Xe6+. The calculations assisted in the determination of themetastable content in the ion beams for Xe5+T and Xe6+. The experimentswere performed by merging a synchrotron photon beam generated by anundulator beamline of the Advanced Light Source with an ion beam producedby an electron cyclotron resonance ion source.

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  • 8th International Conference on the Physics ofX-Ray Multilayer Structures, Japan, March 12-16,2006

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  • Report No.: LBNL--61067
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 932470
  • Archival Resource Key: ark:/67531/metadc902334

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  • May 20, 2006

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  • Sept. 27, 2016, 1:39 a.m.

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  • Oct. 31, 2016, 3:55 p.m.

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Gullikson, E.M.; Salmassi, F.; Aquila, A.L. & Dollar, F. Progress in short period multilayer coatings for water windowapplications, article, May 20, 2006; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc902334/: accessed June 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.