Arsenic-Dominated Chemistry in the Acid Cleaning of InGaAs and InAlAs Surfaces

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The surface cleaning of InGaAs and InAlAs is studied using Synchrotron Radiation Photoelectron Spectroscopy. Thermal annealing at 400 C can not completely remove the native oxides from those surfaces. Elemental arsenic build-up is observed on both surfaces after acid treatment using HCl, HF or H{sub 2}SO{sub 4} solutions, which is similar to acid-cleaned GaAs surface. Cleaned InGaAs surface is oxide free but small amount of aluminum oxide remains on cleaned InAlAs surface. The common chemical reactions between III-As semiconductors and acid solutions are identified and are found to be dominated by arsenic chemistry.

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Sun, Y.; Pianetta, P.; Chen, P.-T.; Kobayashi, M.; Nishi, Y.; Goel, N. et al. October 31, 2008.

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The surface cleaning of InGaAs and InAlAs is studied using Synchrotron Radiation Photoelectron Spectroscopy. Thermal annealing at 400 C can not completely remove the native oxides from those surfaces. Elemental arsenic build-up is observed on both surfaces after acid treatment using HCl, HF or H{sub 2}SO{sub 4} solutions, which is similar to acid-cleaned GaAs surface. Cleaned InGaAs surface is oxide free but small amount of aluminum oxide remains on cleaned InAlAs surface. The common chemical reactions between III-As semiconductors and acid solutions are identified and are found to be dominated by arsenic chemistry.

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  • Journal Name: Appl. Phys. Lett 93:194103,2008

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  • Report No.: SLAC-PUB-13446
  • Grant Number: AC02-76SF00515
  • Office of Scientific & Technical Information Report Number: 940285
  • Archival Resource Key: ark:/67531/metadc902197

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Office of Scientific & Technical Information Technical Reports

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  • October 31, 2008

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  • Sept. 27, 2016, 1:39 a.m.

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  • Dec. 9, 2016, 3:22 p.m.

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Sun, Y.; Pianetta, P.; Chen, P.-T.; Kobayashi, M.; Nishi, Y.; Goel, N. et al. Arsenic-Dominated Chemistry in the Acid Cleaning of InGaAs and InAlAs Surfaces, article, October 31, 2008; [Menlo Park, California]. (digital.library.unt.edu/ark:/67531/metadc902197/: accessed October 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.