Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring.

PDF Version Also Available for Download.

Description

Deep x-ray lithography in combination with electroforming is capable of producing high precision metal parts in small lot series. This study deals with a high aspect ratio structure with overall dimensions on the order of 10 mm x 7 mm x 1.5 mm, with the smallest line width being 150 {micro}m. The lateral deviation from the design is to be kept to a minimum, preferably below 5 {micro}m. To ensure adequate quality control, a semi-automated metrology technique has been established to measure all parts. While the paper will give a brief overview of all involved techniques, it focuses on the ... continued below

Physical Description

20 p.

Creation Information

Aigeldinger, Georg; Skala, Dawn M. & Ceremuga, Joseph T. April 1, 2004.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

Deep x-ray lithography in combination with electroforming is capable of producing high precision metal parts in small lot series. This study deals with a high aspect ratio structure with overall dimensions on the order of 10 mm x 7 mm x 1.5 mm, with the smallest line width being 150 {micro}m. The lateral deviation from the design is to be kept to a minimum, preferably below 5 {micro}m. To ensure adequate quality control, a semi-automated metrology technique has been established to measure all parts. While the paper will give a brief overview of all involved techniques, it focuses on the method to measure the top and bottom of the parts and the top of geometries following the process. The instrument used is a View Engineering Voyager V6x12 microscope, which is fully programmable. The microscope allows direct measurement of geometries but also is capable of saving all captured data as point clouds. These point clouds play a central role when evaluating part geometry. After measuring the part, the point cloud is compared to the computer aided design (CAD) contour of the part, using a commercially available software package. The challenge of proper edge lighting on a nickel alloy part is evaluated by varying lighting conditions systematically. Results of two conditions are presented along with a set of optimized parameters. With the introduced set of tools, process flow can be monitored by measuring geometries, e.g. linewidths in every step of the process line. An example for such analysis is given. After delivery of a large batch of parts, extensive numbers of datasets were available allowing the evaluation of the variation of part geometries. Discussed in detail is the deviation from part top to part bottom geometries indicating swelling of the PMMA mold in the electroplating bath.

Physical Description

20 p.

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Report No.: SAND2004-8208
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/921142 | External Link
  • Office of Scientific & Technical Information Report Number: 921142
  • Archival Resource Key: ark:/67531/metadc900509

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • April 1, 2004

Added to The UNT Digital Library

  • Sept. 27, 2016, 1:39 a.m.

Description Last Updated

  • Nov. 29, 2016, 6:11 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 3
Total Uses: 5

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

Citations, Rights, Re-Use

Aigeldinger, Georg; Skala, Dawn M. & Ceremuga, Joseph T. Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring., report, April 1, 2004; United States. (digital.library.unt.edu/ark:/67531/metadc900509/: accessed November 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.