Structural transformations in Sc/Si multilayers irradiated by EUVlasers

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Multilayer mirrors for the extreme ultraviolet (EUV) are keyelements for numerous applications of coherent EUV sources such as newtabletop lasers and free-electron lasers. However the field ofapplications is limited by the radiation and thermal stability of themultilayers. Taking into account the growing power of EUV sources thestability of the optics becomes crucial. To overcome this problem it isnecessary to study the degradation of multilayers and try to increasetheir temporal and thermal stability. In this paper we report the resultsof detailed study of structural changes in Sc/Simultilayers when exposedto intense EUV laser pulses. Various types of surface damage such asmelting, boiling, ... continued below

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Voronov, D.L.; Zubarev, E.N.; Pershyn, Y.P.; Sevryukova, V.A.; Kondratenko, V.V.; Vinogradov, A.V. et al. August 21, 2007.

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Multilayer mirrors for the extreme ultraviolet (EUV) are keyelements for numerous applications of coherent EUV sources such as newtabletop lasers and free-electron lasers. However the field ofapplications is limited by the radiation and thermal stability of themultilayers. Taking into account the growing power of EUV sources thestability of the optics becomes crucial. To overcome this problem it isnecessary to study the degradation of multilayers and try to increasetheir temporal and thermal stability. In this paper we report the resultsof detailed study of structural changes in Sc/Simultilayers when exposedto intense EUV laser pulses. Various types of surface damage such asmelting, boiling, shockwave creation and ablation were observed asirradiation fluencies increase. Cross-sectional TEM study revealed thatthe layer structure was completely destroyed in the upper part ofmultilayer, but still survived below. The layers adjacent tothe substrateremained intact even through the multilayer surface melted down, thoughthe structure of the layers beneath the molten zone was noticeablychanged. The layer structure in this thermally affected zone is similarto that of isothermally annealed samples. All stages of scandium silicideformation such as interdiffusion, solid-state amorphization, silicidecrystallization, etc., are present in the thermally affected zone. Itindicates a thermal nature of the damage mechanism. The tungstendiffusion barriers were applied to the scandium/silicon interfaces. Itwas shown that the barriers inhibited interdiffusion and increased thethermal stability of Sc/Si mirrors.

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  • Optics and Photonics 2007: Optical engineeringand Applications Symposium , Soft X-Ray Lasers and Applications VII, SanDiego, CA, August 26-30, 2007

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  • Report No.: LBNL--63324
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 929048
  • Archival Resource Key: ark:/67531/metadc900326

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  • August 21, 2007

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  • Sept. 27, 2016, 1:39 a.m.

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  • Dec. 2, 2016, 12:51 p.m.

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Voronov, D.L.; Zubarev, E.N.; Pershyn, Y.P.; Sevryukova, V.A.; Kondratenko, V.V.; Vinogradov, A.V. et al. Structural transformations in Sc/Si multilayers irradiated by EUVlasers, article, August 21, 2007; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc900326/: accessed July 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.