System-level line-edge roughness limits in extreme ultraviolet lithography

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As critical dimensions shrink, line edge and width roughness (LER and LWR) become of increasing concern. Traditionally LER is viewed as a resist-limited effect; however, as critical dimensions shrink and LER requirements become proportionally more stringent, system-level effects begin to play an important role. Recent advanced EUV resist testing results have demonstrated lower bounds on achievable LER at the level of approximately 2 to 3 nm. Here we use modeling to demonstrate that a significant portion of this low bound may in fact be do to system-level effects and in particular the mask. Of concern are both LER on the ... continued below

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Jones, Juanita; Naulleau, Patrick P; Niakoula, Dimitra & Zhang, Guojing February 13, 2008.

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As critical dimensions shrink, line edge and width roughness (LER and LWR) become of increasing concern. Traditionally LER is viewed as a resist-limited effect; however, as critical dimensions shrink and LER requirements become proportionally more stringent, system-level effects begin to play an important role. Recent advanced EUV resist testing results have demonstrated lower bounds on achievable LER at the level of approximately 2 to 3 nm. Here we use modeling to demonstrate that a significant portion of this low bound may in fact be do to system-level effects and in particular the mask. Of concern are both LER on the mask as well as roughness of the multilayer reflector. Modeling also shows roughness (flare) in the projection optics not to be of concern.

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24

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  • Journal Name: Journal of Vacuum Science and Technology

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  • Report No.: LBNL-35E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 936097
  • Archival Resource Key: ark:/67531/metadc900221

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • February 13, 2008

Added to The UNT Digital Library

  • Sept. 27, 2016, 1:39 a.m.

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  • Oct. 2, 2017, 4:27 p.m.

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Jones, Juanita; Naulleau, Patrick P; Niakoula, Dimitra & Zhang, Guojing. System-level line-edge roughness limits in extreme ultraviolet lithography, article, February 13, 2008; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc900221/: accessed October 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.