Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory

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The next generation of synchrotrons and free electron laser facilities requires x-ray optical systems with extremely high performance, generally of diffraction limited quality. Fabrication and use of such optics requires adequate, highly accurate metrology and dedicated instrumentation. Previously, we suggested ways to improve the performance of the Long Trace Profiler (LTP), a slope measuring instrument widely used to characterize x-ray optics at long spatial wavelengths. The main way is use of a CCD detector and corresponding technique for calibration of photo-response non-uniformity [J. L. Kirschman, et al., Proceedings of SPIE 6704, 67040J (2007)]. The present work focuses on the performance ... continued below

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Source, Advanced Light; Yashchuk, Valeriy V; Kirschman, Jonathan L.; Domning, Edward E.; McKinney, Wayne R.; Morrison, Gregory Y. et al. July 14, 2008.

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The next generation of synchrotrons and free electron laser facilities requires x-ray optical systems with extremely high performance, generally of diffraction limited quality. Fabrication and use of such optics requires adequate, highly accurate metrology and dedicated instrumentation. Previously, we suggested ways to improve the performance of the Long Trace Profiler (LTP), a slope measuring instrument widely used to characterize x-ray optics at long spatial wavelengths. The main way is use of a CCD detector and corresponding technique for calibration of photo-response non-uniformity [J. L. Kirschman, et al., Proceedings of SPIE 6704, 67040J (2007)]. The present work focuses on the performance and characteristics of the upgraded LTP-II at the ALS Optical Metrology Laboratory. This includes a review of the overall aspects of the design, control system, the movement and measurement regimes for the stage, and analysis of the performance by a slope measurement of a highly curved super-quality substrate with less than 0.3 microradian (rms)slope variation.

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  • Optical Engineering and Applications 2008, part of SPIE Optics and Photonics 2008;Conference #7707: Advances in X-Ray/EUV Optics and Components III, San Diego, CA, August 10-14, 2008

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  • Report No.: LBNL-631E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 935333
  • Archival Resource Key: ark:/67531/metadc900189

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  • July 14, 2008

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  • Sept. 27, 2016, 1:39 a.m.

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  • Jan. 4, 2017, 4:51 p.m.

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Source, Advanced Light; Yashchuk, Valeriy V; Kirschman, Jonathan L.; Domning, Edward E.; McKinney, Wayne R.; Morrison, Gregory Y. et al. Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory, article, July 14, 2008; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc900189/: accessed August 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.