Plastic deformation in Al (Cu) interconnects stressed by electromigration and studied by synchrotron polychromatic X-ray microdiffraction

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We report here an in-depth synchrotron radiation based white beam X-ray microdiffraction study of plasticity in individual grains of an Al (Cu) interconnect during the early stage of electromigration. The study shows a rearrangement of the geometrically necessary dislocations (GND) in bamboo typed grains during that stage. We find that about 90percent of the GNDs are oriented so that their line direction is the closest to the current flow direction. In non-bamboo typed grains, the Laue peak positions shift, indicating that the grains rotate. An analysis in terms of force directions has been carried out and is consistent with observed ... continued below

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Source, Advanced Light; UCLA; Chen, Kai; Chen, Kai; Tamura, Nobumichi; Valek, Bryan C. et al. May 14, 2008.

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We report here an in-depth synchrotron radiation based white beam X-ray microdiffraction study of plasticity in individual grains of an Al (Cu) interconnect during the early stage of electromigration. The study shows a rearrangement of the geometrically necessary dislocations (GND) in bamboo typed grains during that stage. We find that about 90percent of the GNDs are oriented so that their line direction is the closest to the current flow direction. In non-bamboo typed grains, the Laue peak positions shift, indicating that the grains rotate. An analysis in terms of force directions has been carried out and is consistent with observed electromigration induced grain rotation and bending.

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  • Journal Name: Journal of Applied Physics

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  • Report No.: LBNL-346E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 929698
  • Archival Resource Key: ark:/67531/metadc900071

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  • May 14, 2008

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  • Sept. 27, 2016, 1:39 a.m.

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  • Jan. 4, 2017, 4:38 p.m.

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Source, Advanced Light; UCLA; Chen, Kai; Chen, Kai; Tamura, Nobumichi; Valek, Bryan C. et al. Plastic deformation in Al (Cu) interconnects stressed by electromigration and studied by synchrotron polychromatic X-ray microdiffraction, article, May 14, 2008; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc900071/: accessed October 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.