Precision Tiltmeter as a Reference for Slope MeasuringInstruments

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The next generation of synchrotrons and free electron lasers require extremely high-performance x-ray optical systems for proper focusing. The necessary optics cannot be fabricated without the use of precise optical metrology instrumentation. In particular, the Long Trace Profiler (LTP) based on the pencil-beam interferometer is a valuable tool for low-spatial-frequency slope measurement with x-ray optics. The limitations of such a device are set by the amount of systematic errors and noise. A significant improvement of LTP performance was the addition of an optical reference channel, which allowed to partially account for systematic errors associated with wiggling and wobbling of the ... continued below

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Kirschman, Jonathan L.; Domning, Edward E.; Morrison, Gregory Y.; Smith, Brian V. & Yashchuk, Valeriy V. August 1, 2007.

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The next generation of synchrotrons and free electron lasers require extremely high-performance x-ray optical systems for proper focusing. The necessary optics cannot be fabricated without the use of precise optical metrology instrumentation. In particular, the Long Trace Profiler (LTP) based on the pencil-beam interferometer is a valuable tool for low-spatial-frequency slope measurement with x-ray optics. The limitations of such a device are set by the amount of systematic errors and noise. A significant improvement of LTP performance was the addition of an optical reference channel, which allowed to partially account for systematic errors associated with wiggling and wobbling of the LTP carriage. However, the optical reference is affected by changing optical path length, non-homogeneous optics, and air turbulence. In the present work, we experimentally investigate the questions related to the use of a precision tiltmeter as a reference channel. Dependence of the tiltmeter performance on horizontal acceleration, temperature drift, motion regime, and kinematical scheme of the translation stage has been investigated. It is shown that at an appropriate experimental arrangement, the tiltmeter provides a slope reference for the LTP system with accuracy on the level of 0.1 {micro}rad (rms).

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  • SPIE Optics and Photonics 2007: Advances inMetrology for X-Ray and EUV Optics II, San Diego, CA, USA, 26-30 August2007

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  • Report No.: LBNL--62491
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 928381
  • Archival Resource Key: ark:/67531/metadc898853

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • August 1, 2007

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  • Sept. 27, 2016, 1:39 a.m.

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  • Oct. 31, 2016, 3:55 p.m.

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Kirschman, Jonathan L.; Domning, Edward E.; Morrison, Gregory Y.; Smith, Brian V. & Yashchuk, Valeriy V. Precision Tiltmeter as a Reference for Slope MeasuringInstruments, article, August 1, 2007; (digital.library.unt.edu/ark:/67531/metadc898853/: accessed January 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.