Fabrication of Pillar-Structured Thermal Neutron Detectors

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Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, ({sup 10}B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 {micro}m diameter silicon pillars with a 4 {micro}m pitch and pillar heights of 6 and 12 {micro}m. The pillar detector with a 12 ... continued below

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6 p. (0.4 MB)

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Nikolic, R J; Conway, A M; Reinhardt, C E; Graff, R T; Wang, T F; Deo, N et al. November 19, 2007.

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Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, ({sup 10}B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 {micro}m diameter silicon pillars with a 4 {micro}m pitch and pillar heights of 6 and 12 {micro}m. The pillar detector with a 12 {micro}m height achieved a thermal neutron detection efficiency of 7.3% at 2V.

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6 p. (0.4 MB)

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PDF-file: 6 pages; size: 0.4 Mbytes

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  • Presented at: IEEE Nuclear Science Symposium, Honolulu, HI, United States, Oct 27 - Nov 03, 2007

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  • Report No.: UCRL-PROC-236680
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 924015
  • Archival Resource Key: ark:/67531/metadc898705

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  • November 19, 2007

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  • Sept. 27, 2016, 1:39 a.m.

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  • April 17, 2017, 12:19 p.m.

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Nikolic, R J; Conway, A M; Reinhardt, C E; Graff, R T; Wang, T F; Deo, N et al. Fabrication of Pillar-Structured Thermal Neutron Detectors, article, November 19, 2007; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc898705/: accessed October 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.