Extreme Ultraviolet Phase Contrast Imaging

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Description

The conclusions of this report are: (1) zone plate microscopy provides high resolution imaging of EUV masks; (2) using phase plates in the back focal plane of the objective lens can provide contrast mechanisms for measurement of the phase shift from defects on the mask; (3) the first high resolution EUV Zernike phase contrast images have been acquired; and (4) future work will include phase contrast mode in reflection from an EUV mask to directly measure the reflectivity and phase shift from defects.

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Denbeaux, Gregory; Garg, Rashi; Aquila, Andy; Barty, Anton; Goldberg, Kenneth; Gullikson, Eric et al. November 1, 2005.

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Description

The conclusions of this report are: (1) zone plate microscopy provides high resolution imaging of EUV masks; (2) using phase plates in the back focal plane of the objective lens can provide contrast mechanisms for measurement of the phase shift from defects on the mask; (3) the first high resolution EUV Zernike phase contrast images have been acquired; and (4) future work will include phase contrast mode in reflection from an EUV mask to directly measure the reflectivity and phase shift from defects.

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  • 2005 International Symposium on ExtremeUltraviolet Lithography, San Diego, CA, Nov. 7-9,2007

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  • Report No.: LBNL--61243
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 927818
  • Archival Resource Key: ark:/67531/metadc898321

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • November 1, 2005

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  • Sept. 27, 2016, 1:39 a.m.

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Denbeaux, Gregory; Garg, Rashi; Aquila, Andy; Barty, Anton; Goldberg, Kenneth; Gullikson, Eric et al. Extreme Ultraviolet Phase Contrast Imaging, article, November 1, 2005; United States. (digital.library.unt.edu/ark:/67531/metadc898321/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.