Deterministic processing of alumina with ultra-short laser pulses

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Ultrashort pulsed lasers can accurately ablate materials which are refractory, transparent, or are otherwise difficult to machine by other methods. The typical method of machining surfaces with ultrashort laser pulses is by raster scanning, or the machining of sequentially overlapping linear trenches. Experiments in which linear trenches were machined in alumina at various pulse overlaps and incident fluences are presented, and the dependence of groove depth on these parameters established. A model for the machining of trenches based on experimental data in alumina is presented, which predicts and matches observed trench geometry. This model is then used to predict optimal ... continued below

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PDF-file: 13 pages; size: 1.7 Mbytes

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Furmanski, J; Rubenchik, A M; Shirk, M D & Stuart, B C June 27, 2007.

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Ultrashort pulsed lasers can accurately ablate materials which are refractory, transparent, or are otherwise difficult to machine by other methods. The typical method of machining surfaces with ultrashort laser pulses is by raster scanning, or the machining of sequentially overlapping linear trenches. Experiments in which linear trenches were machined in alumina at various pulse overlaps and incident fluences are presented, and the dependence of groove depth on these parameters established. A model for the machining of trenches based on experimental data in alumina is presented, which predicts and matches observed trench geometry. This model is then used to predict optimal process parameters for the machining of trenches for maximal material removal rate for a given laser.

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PDF-file: 13 pages; size: 1.7 Mbytes

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  • Journal Name: Journal of Applied Physics, vol. 102, no. 7, October 12, 2007, pp. 073112; Journal Volume: 102; Journal Issue: 7

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  • Report No.: UCRL-JRNL-232315
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 942029
  • Archival Resource Key: ark:/67531/metadc898165

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Office of Scientific & Technical Information Technical Reports

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  • June 27, 2007

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  • Sept. 27, 2016, 1:39 a.m.

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  • Nov. 23, 2016, 3:12 p.m.

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Furmanski, J; Rubenchik, A M; Shirk, M D & Stuart, B C. Deterministic processing of alumina with ultra-short laser pulses, article, June 27, 2007; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc898165/: accessed October 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.