Holographic optical elements for the extreme-ultravioletregime

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As the development of extreme ultraviolet (EUV) lithography progresses, interest grows in the extension of traditional optical components to the EUV regime. The strong absorption of EUV by most materials and its extremely short wavelength, however, makes it very difficult to implement many components that are commonplace in the longer wavelength regimes. One such component is the diffractive optical element used, for example, in illumination systems to efficiently generate modified pupil fills. Here we demonstrate the fabrication and characterization of EUV binary phase-only computer-generated holograms allowing arbitrary far-field diffraction patterns to be generated.

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Naulleau, Patrick P.; Salmassi, Farhad; Gullikson, Eric M. & Anderson, Erik H. August 14, 2006.

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As the development of extreme ultraviolet (EUV) lithography progresses, interest grows in the extension of traditional optical components to the EUV regime. The strong absorption of EUV by most materials and its extremely short wavelength, however, makes it very difficult to implement many components that are commonplace in the longer wavelength regimes. One such component is the diffractive optical element used, for example, in illumination systems to efficiently generate modified pupil fills. Here we demonstrate the fabrication and characterization of EUV binary phase-only computer-generated holograms allowing arbitrary far-field diffraction patterns to be generated.

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  • Photonics West, San Jose, CA, Jan. 20-25,2007

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  • Report No.: LBNL--61499
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 928429
  • Archival Resource Key: ark:/67531/metadc897176

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  • August 14, 2006

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  • Sept. 27, 2016, 1:39 a.m.

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  • Nov. 29, 2016, 12:55 p.m.

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Naulleau, Patrick P.; Salmassi, Farhad; Gullikson, Eric M. & Anderson, Erik H. Holographic optical elements for the extreme-ultravioletregime, article, August 14, 2006; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc897176/: accessed September 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.