Binary Pseudo-random Grating Standard for Calibration of Surface Profilometers

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We suggest and describe the use of a binary pseudo-random (BPR) grating as a standard test surface for measurement of the modulation transfer function (MTF) of interferometric microscopes. Knowledge of the MTF of a microscope is absolutely necessary to convert the measured height distribution of a surface undergoing metrology into an accurate power spectral density (PSD) distribution. For an'ideal' microscope with an MTF function independent of spatial frequency out to the Nyquist frequency of the detector array with zero response at higher spatial frequencies, a BPR grating would produce a flat 1D PSD spectrum, independent of spatial frequency. For a'real' ... continued below

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Yashchuk, Valeriy; Yashchuk, Valeriy V.; McKinney, Wayne R. & Takacs, Peter Z. January 16, 2008.

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Description

We suggest and describe the use of a binary pseudo-random (BPR) grating as a standard test surface for measurement of the modulation transfer function (MTF) of interferometric microscopes. Knowledge of the MTF of a microscope is absolutely necessary to convert the measured height distribution of a surface undergoing metrology into an accurate power spectral density (PSD) distribution. For an'ideal' microscope with an MTF function independent of spatial frequency out to the Nyquist frequency of the detector array with zero response at higher spatial frequencies, a BPR grating would produce a flat 1D PSD spectrum, independent of spatial frequency. For a'real' instrument, the MTF is found as the square root of the ratio of the PSD spectrum measured with the BPR grating to the'ideal,' spatial frequency independent, PSD spectrum. We present the results from a measurement of the MTF of MicromapTM-570 interferometric microscope demonstrating a high efficiency for the calibration method.

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21

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  • Journal Name: Optical Engineering; Journal Volume: July 2008; Related Information: Journal Publication Date: July 2008

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  • Report No.: LBNL-640E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 934963
  • Archival Resource Key: ark:/67531/metadc896749

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  • January 16, 2008

Added to The UNT Digital Library

  • Sept. 27, 2016, 1:39 a.m.

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  • Jan. 4, 2017, 3:31 p.m.

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Yashchuk, Valeriy; Yashchuk, Valeriy V.; McKinney, Wayne R. & Takacs, Peter Z. Binary Pseudo-random Grating Standard for Calibration of Surface Profilometers, article, January 16, 2008; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc896749/: accessed August 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.