Process Development and Integration Lab (PDIL) + Measurements and Characterization (Presentation)

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Description

The Process Development and Integration Lab (PDIL) Vision is to integrate deposition, characterization, and processing by being flexible and robust; having a standardized transfer interface; and controlled sample ambient between tools. The benefits are: (1) answers to previously inaccessible research questions; (2) control and characterization of critical surfaces (interfaces) and how their impact on subsequent layers; (3) assess process-related source chemistry, surface chemistry and kinetics, and bulk reconstruction; (4) grow layers and alter interfaces using controlled processes and transfer ambients (without exposure to air); (5) develop new techniques, methodologies, device structures, materials, and tools (growth, processing, and analytical); and (6) ... continued below

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10 p.

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Nelson, B. April 1, 2008.

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Description

The Process Development and Integration Lab (PDIL) Vision is to integrate deposition, characterization, and processing by being flexible and robust; having a standardized transfer interface; and controlled sample ambient between tools. The benefits are: (1) answers to previously inaccessible research questions; (2) control and characterization of critical surfaces (interfaces) and how their impact on subsequent layers; (3) assess process-related source chemistry, surface chemistry and kinetics, and bulk reconstruction; (4) grow layers and alter interfaces using controlled processes and transfer ambients (without exposure to air); (5) develop new techniques, methodologies, device structures, materials, and tools (growth, processing, and analytical); and (6) improved collaborations with university and industry researchers.

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10 p.

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  • Presented at the Solar Energy Technologies Program (SETP) Annual Program Review Meeting, 22-24 April 2008, Austin, Texas; Related Information: 2008 Solar Annual Review Meeting

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  • Report No.: NREL/PR-520-43173
  • Grant Number: AC36-99-GO10337
  • Office of Scientific & Technical Information Report Number: 940606
  • Archival Resource Key: ark:/67531/metadc896402

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • April 1, 2008

Added to The UNT Digital Library

  • Sept. 27, 2016, 1:39 a.m.

Description Last Updated

  • April 4, 2017, 12:59 p.m.

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Nelson, B. Process Development and Integration Lab (PDIL) + Measurements and Characterization (Presentation), article, April 1, 2008; Golden, Colorado. (digital.library.unt.edu/ark:/67531/metadc896402/: accessed October 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.