Wafer Replacement Cluster Tool Slide: 4 of 11
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Vision for wafer replacement Si
Film Si growth:Sand
Add Carbon &
Heat Energy
Fn1]metallurgical
grade Si
pure
SiHC3
or
SiH4HWCVD is best
low-T scalable
E
technique NEpitaxial
Silicon
Seed LayerGlass Substrate
Directly deposit
enough pure silicon
for light absorption
30
L. J
..,O
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Branz, H. M. Wafer Replacement Cluster Tool, presentation, April 1, 2008; Golden, Colorado. (https://digital.library.unt.edu/ark:/67531/metadc896171/m1/4/: accessed April 24, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.