Spin-on-glass coatings for the generation of super-polishedsubstrates for extreme ultraviolet optics

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Substrates intended for use as extreme ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when non-conventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating super-polished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.3 to 3.7 nm range have been smoothed to the 0.4 to 0.6 nm range. EUV reflectometry characterization of these optics has demonstrated reflectivities of ... continued below

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Salmassi, Farhad; Naulleau, Patrick P. & Gullikson, Eric M. January 1, 2005.

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Substrates intended for use as extreme ultraviolet (EUV) optics have extremely stringent requirements in terms of finish. These requirements can dramatically increase the cost and fabrication time, especially when non-conventional shapes, such as toroids, are required. Here we present a spin-on-glass resist process capable of generating super-polished parts from inexpensive substrates. The method has been used to render diamond-turned substrates compatible for use as EUV optics. Toroidal diamond-turned optics with starting rms roughness in the 3.3 to 3.7 nm range have been smoothed to the 0.4 to 0.6 nm range. EUV reflectometry characterization of these optics has demonstrated reflectivities of approximately 63%.

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  • Journal Name: Applied Optics; Journal Volume: 45; Journal Issue: 11; Related Information: Journal Publication Date: April 2006

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  • Report No.: LBNL--60349
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 923395
  • Archival Resource Key: ark:/67531/metadc895685

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  • January 1, 2005

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  • Sept. 27, 2016, 1:39 a.m.

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  • Dec. 9, 2016, 10:28 p.m.

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Salmassi, Farhad; Naulleau, Patrick P. & Gullikson, Eric M. Spin-on-glass coatings for the generation of super-polishedsubstrates for extreme ultraviolet optics, article, January 1, 2005; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc895685/: accessed August 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.