Experiments with planar inductive ion source meant for creation ofH+ Beams

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In this article the effect of different engineering parameters of an rf-driven ion sources with external spiral antenna and quartz disk rf-window are studied. Paper consists of three main topics: The effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species and the effect of different antenna geometries on the extracted current density. The operation gas pressure as a function of the plasma chamber diameter, was studied. This was done with three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two ... continued below

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Vainionpaa, J.H.; Kalvas, T.; Hahto, S.K. & Reijonen, J. February 7, 2007.

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Description

In this article the effect of different engineering parameters of an rf-driven ion sources with external spiral antenna and quartz disk rf-window are studied. Paper consists of three main topics: The effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species and the effect of different antenna geometries on the extracted current density. The operation gas pressure as a function of the plasma chamber diameter, was studied. This was done with three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two materials, aluminum and alumina (AlO{sub 2}). The removable 14 magnet multicusp confinement arrangement enabled us to compare the effects of the two wall materials with and without the magnetic confinement. Highest proton fraction of {approx} 8% at 2000 W of rf-power and at pressure of 1.3 Pa was measured using AlO{sub 2} plasma chamber and no multicusp confinement. For all the compared ion sources at 1000W of rf-power, source with multicusp confinement and AlO2 plasma chamber yields highest current density of 82.7 mA/cm{sup 2} at operation pressure of 4 Pa. From the same source highest measured current density of 143 mA/cm{sup 2} at 1.3 Pa and 2200W of rf-power was achieved. Multicusp confinement increased the maximum extracted current up to factor of two. Plasma production with different antenna geometries was also studied. Antenna tests were performed using same source geometry as in source material study with AlO{sub 2} plasma chamber and multicusp confinement. The highest current density was achieved with 4.5 loop solenoid antenna with 6 cm diameter. Slightly lower current density with lower pressure was achieved using tightly wound 3 loop spiral antenna with 3.3 cm ID and 6 cm OD.

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  • Journal Name: Review of Scientific Instruments; Journal Volume: 78; Journal Issue: 6; Related Information: Journal Publication Date: 06/2007

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  • Report No.: LBNL--61784
  • Grant Number: DE-AC02-05CH11231
  • DOI: 10.1063/1.2742624 | External Link
  • Office of Scientific & Technical Information Report Number: 928770
  • Archival Resource Key: ark:/67531/metadc895556

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  • February 7, 2007

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  • Sept. 27, 2016, 1:39 a.m.

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  • Dec. 5, 2016, 3:32 p.m.

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Vainionpaa, J.H.; Kalvas, T.; Hahto, S.K. & Reijonen, J. Experiments with planar inductive ion source meant for creation ofH+ Beams, article, February 7, 2007; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc895556/: accessed September 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.