The link between a negative high resolution resist contrast/developer performance and the Flory-Huggins parameter estimated from the Hansen solubility sphere

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We have implemented a technique to identify candidate polymer solvents for spinning, developing, and rinsing for a high resolution, negative electron beam resist hexa-methyl acetoxy calix(6)arene to elicit the optimum pattern development performance. Using the three dimensional Hansen solubility parameters for over 40 solvents, we have constructed a Hansen solubility sphere. From this sphere, we have estimated the Flory Huggins interaction parameter for solvents with hexa-methyl acetoxy calix(6)arene and found a correlation between resist development contrast and the Flory-Huggins parameter. This provides new insights into the development behavior of resist materials which are necessary for obtaining the ultimate lithographic resolution.

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StCaire, Lorri; Olynick, Deirdre L.; Chao, Weilun L.; Lewis, Mark D.; Lu, Haoren; Dhuey, Scott D. et al. July 1, 2008.

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We have implemented a technique to identify candidate polymer solvents for spinning, developing, and rinsing for a high resolution, negative electron beam resist hexa-methyl acetoxy calix(6)arene to elicit the optimum pattern development performance. Using the three dimensional Hansen solubility parameters for over 40 solvents, we have constructed a Hansen solubility sphere. From this sphere, we have estimated the Flory Huggins interaction parameter for solvents with hexa-methyl acetoxy calix(6)arene and found a correlation between resist development contrast and the Flory-Huggins parameter. This provides new insights into the development behavior of resist materials which are necessary for obtaining the ultimate lithographic resolution.

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  • Journal Name: Macromolecules

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  • Report No.: LBNL-849E
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 936609
  • Archival Resource Key: ark:/67531/metadc894001

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  • July 1, 2008

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  • Sept. 27, 2016, 1:39 a.m.

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  • Oct. 2, 2017, 5:06 p.m.

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StCaire, Lorri; Olynick, Deirdre L.; Chao, Weilun L.; Lewis, Mark D.; Lu, Haoren; Dhuey, Scott D. et al. The link between a negative high resolution resist contrast/developer performance and the Flory-Huggins parameter estimated from the Hansen solubility sphere, article, July 1, 2008; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc894001/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.