Asymmetric injection of cathodic arc plasma into a macroparticlefilter

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The cathodic arc plasmas produced by cathode spots usuallyinclude macroparticles, which is undesirable for many applications. Acommon way of removing macroparticles is to use curved solenoid filterswhich guide the plasma from the source to the substrate. In this work, anarc source with relatively small cathode is used, limiting the possiblelocations of plasma production. The relative position of cathodic arcsource and macroparticle filtered was systematically varied and thefiltered plasma current was recorded. It was found that axis-symmetricplasma injection leads to maximum throughput only if an anode aperturewas used, which limited the plasma to near-axis flow by scraping offplasma at larger angles ... continued below

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Anders, Andre & MacGill, Robert A. February 11, 2004.

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Description

The cathodic arc plasmas produced by cathode spots usuallyinclude macroparticles, which is undesirable for many applications. Acommon way of removing macroparticles is to use curved solenoid filterswhich guide the plasma from the source to the substrate. In this work, anarc source with relatively small cathode is used, limiting the possiblelocations of plasma production. The relative position of cathodic arcsource and macroparticle filtered was systematically varied and thefiltered plasma current was recorded. It was found that axis-symmetricplasma injection leads to maximum throughput only if an anode aperturewas used, which limited the plasma to near-axis flow by scraping offplasma at larger angles to the axis. When the anode aperture was removed,more plasma could enter the filter. In this case, maximum filtered ioncurrent was achieved when the plasma was injected off-axis, namely offsetin the direction where the filter is curved. Such behavior wasanticipated because the plasma column in the filter is known to beshifted by ExB and centrifugal drift as well as by non-axis-symmetriccomponents of the magnetic field in the filter entrance and exit plane.The data have implications for plasma transport variations caused bydifferent spot locations on cathodes that are not small compared to thefilter cross section.

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  • Journal Name: Journal of Applied Physics; Journal Volume: 95; Related Information: Journal Publication Date: 15 June 2004

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  • Report No.: LBNL--54195
  • Grant Number: DE-AC02-05CH11231
  • Grant Number: INDUSTRY:LBNL-SOW000416
  • DOI: 10.1063/1.1707200 | External Link
  • Office of Scientific & Technical Information Report Number: 882065
  • Archival Resource Key: ark:/67531/metadc892919

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • February 11, 2004

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  • Sept. 23, 2016, 2:42 p.m.

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  • Dec. 13, 2016, 8:54 p.m.

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Anders, Andre & MacGill, Robert A. Asymmetric injection of cathodic arc plasma into a macroparticlefilter, article, February 11, 2004; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc892919/: accessed October 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.