Binary pseudo-random grating as a standard test surface formeasurement of modulation transfer function of interferometricmicroscopes

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The task of designing high performance X-ray optical systemsrequires the development of sophisticated X-ray scattering calculationsbased on rigorous information about the optics. One of the mostinsightful approaches to these calculations is based on the powerspectral density (PSD) distribution of the surface height. The majorproblem of measurement of a PSD distribution with an interferometricand/or atomic force microscope arises due to the unknown ModulationTransfer Function (MTF) of the instruments. The MTF characterizes theperturbation of the PSD distribution at higher spatial frequencies. Here,we describe a new method and dedicated test surfaces for calibration ofthe MTF of a microscope. The method is based on ... continued below

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Yashchuk, Valeriy V.; McKinney, Wayne R. & Takacs, Peter Z. July 25, 2007.

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Description

The task of designing high performance X-ray optical systemsrequires the development of sophisticated X-ray scattering calculationsbased on rigorous information about the optics. One of the mostinsightful approaches to these calculations is based on the powerspectral density (PSD) distribution of the surface height. The majorproblem of measurement of a PSD distribution with an interferometricand/or atomic force microscope arises due to the unknown ModulationTransfer Function (MTF) of the instruments. The MTF characterizes theperturbation of the PSD distribution at higher spatial frequencies. Here,we describe a new method and dedicated test surfaces for calibration ofthe MTF of a microscope. The method is based on use of a speciallydesigned Binary Pseudo-random (BPR) grating. Comparison of atheoretically calculated PSD spectrum of a BPR grating with a spectrummeasured with the grating provides the desired calibration of theinstrumental MTF. The theoretical background of the method, as well asresults of experimental investigations are presented.

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  • SPIE Optics and Photonics 2007: TechnicalConference OP07O: 'Optical Engineering and Applications:' Conference 6704'Advances in Metrology for X-ray and EUV Optics II', San Diego, CA,August 26-30, 2007

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  • Report No.: LBNL--63257
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 919268
  • Archival Resource Key: ark:/67531/metadc889071

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 25, 2007

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  • Sept. 22, 2016, 2:13 a.m.

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  • Oct. 31, 2016, 3:49 p.m.

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Yashchuk, Valeriy V.; McKinney, Wayne R. & Takacs, Peter Z. Binary pseudo-random grating as a standard test surface formeasurement of modulation transfer function of interferometricmicroscopes, article, July 25, 2007; (digital.library.unt.edu/ark:/67531/metadc889071/: accessed September 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.