Side extraction duoPIGatron-type ion source.

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We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in such the ion can be extracted from side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has stable arc, uniformly bright illumination, and dense plasma. The present work describes some of preliminary operating parameters of the ion source using Argon, BF3. The total unanalyzed beam currents are 23 mA ... continued below

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GUSHENETS,V.I.; OKS, E.M.; HERSCHOVITCH, A. & JOHNSON, B.M. August 26, 2007.

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We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in such the ion can be extracted from side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has stable arc, uniformly bright illumination, and dense plasma. The present work describes some of preliminary operating parameters of the ion source using Argon, BF3. The total unanalyzed beam currents are 23 mA using Ar at an arc current 5 A and 13 mA using BF3 gas at an arc current 6 A.

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  • 12TH INTERNATIONAL CONFERENCE ON ION SOURCES (ICIS 2007); JEJU, KOREA; 20070826 through 20070831

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  • Report No.: BNL--79412-2007-CP
  • Grant Number: DE-AC02-98CH10886
  • Office of Scientific & Technical Information Report Number: 918608
  • Archival Resource Key: ark:/67531/metadc888706

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  • August 26, 2007

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  • Sept. 22, 2016, 2:13 a.m.

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  • Nov. 1, 2016, 5:33 p.m.

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GUSHENETS,V.I.; OKS, E.M.; HERSCHOVITCH, A. & JOHNSON, B.M. Side extraction duoPIGatron-type ion source., article, August 26, 2007; United States. (digital.library.unt.edu/ark:/67531/metadc888706/: accessed October 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.