Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems

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We have built and calibrated a set of 532-nm wavelength wavefront reference sources that fill a numerical aperture of 0.3. Early data show that they have a measured departure from sphericity of less than 0.2 nm RMS (0.4 milliwaves) and a reproducibility of better than 0.05 nm rms. These devices are compact, portable, fiber-fed, and are intended as sources of measurement and reference waves in wavefront measuring interferometers used for metrology of EUVL optical elements and systems. Keys to wave front accuracy include fabrication of an 800-nm pinhole in a smooth reflecting surface as well as a calibration procedure capable ... continued below

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12 p. (0.5 MB)

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Johnson, M A; Phillion, D W; Sommargren, G E; Decker, T A; Taylor, J S; Gomei, Y et al. July 1, 2005.

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We have built and calibrated a set of 532-nm wavelength wavefront reference sources that fill a numerical aperture of 0.3. Early data show that they have a measured departure from sphericity of less than 0.2 nm RMS (0.4 milliwaves) and a reproducibility of better than 0.05 nm rms. These devices are compact, portable, fiber-fed, and are intended as sources of measurement and reference waves in wavefront measuring interferometers used for metrology of EUVL optical elements and systems. Keys to wave front accuracy include fabrication of an 800-nm pinhole in a smooth reflecting surface as well as a calibration procedure capable of measuring axisymmetric and non-axisymmetric errors.

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12 p. (0.5 MB)

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PDF-file: 12 pages; size: 0.5 Mbytes

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  • Presented at: SPIE Optical Manufacturing and Testing VI, San Diego, CA, United States, Jul 31 - Aug 04, 2005

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  • Report No.: UCRL-PROC-213375
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 919225
  • Archival Resource Key: ark:/67531/metadc888308

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  • July 1, 2005

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  • Sept. 22, 2016, 2:13 a.m.

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  • April 13, 2017, 3:44 p.m.

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Johnson, M A; Phillion, D W; Sommargren, G E; Decker, T A; Taylor, J S; Gomei, Y et al. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems, article, July 1, 2005; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc888308/: accessed September 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.