SummitView 1.0: a code to automatically generate 3D solid models of surface micro-machining based MEMS designs.

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This report describes the SummitView 1.0 computer code developed at Sandia National Laboratories. SummitView is designed to generate a 3D solid model, amenable to visualization and meshing, that represents the end state of a microsystem fabrication process such as the SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) V process. Functionally, SummitView performs essentially the same computational task as an earlier code called the 3D Geometry modeler [1]. However, because SummitView is based on 2D instead of 3D data structures and operations, it has significant speed and robustness advantages. As input it requires a definition of both the process itself and the ... continued below

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114 p.

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McBride, Cory L. (Elemental Technologies, American Fort, UT); Yarberry, Victor R.; Schmidt, Rodney Cannon & Meyers, Ray J. (Elemental Technologies, American Fort, UT) November 1, 2006.

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Description

This report describes the SummitView 1.0 computer code developed at Sandia National Laboratories. SummitView is designed to generate a 3D solid model, amenable to visualization and meshing, that represents the end state of a microsystem fabrication process such as the SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) V process. Functionally, SummitView performs essentially the same computational task as an earlier code called the 3D Geometry modeler [1]. However, because SummitView is based on 2D instead of 3D data structures and operations, it has significant speed and robustness advantages. As input it requires a definition of both the process itself and the collection of individual 2D masks created by the designer and associated with each of the process steps. The definition of the process is contained in a special process definition file [2] and the 2D masks are contained in MEM format files [3]. The code is written in C++ and consists of a set of classes and routines. The classes represent the geometric data and the SUMMiT V process steps. Classes are provided for the following process steps: Planar Deposition, Planar Etch, Conformal Deposition, Dry Etch, Wet Etch and Release Etch. SummitView is built upon the 2D Boolean library GBL-2D [4], and thus contains all of that library's functionality.

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114 p.

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  • Report No.: SAND2006-6828
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/899720 | External Link
  • Office of Scientific & Technical Information Report Number: 899720
  • Archival Resource Key: ark:/67531/metadc887905

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  • November 1, 2006

Added to The UNT Digital Library

  • Sept. 22, 2016, 2:13 a.m.

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  • Dec. 2, 2016, 1:24 p.m.

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McBride, Cory L. (Elemental Technologies, American Fort, UT); Yarberry, Victor R.; Schmidt, Rodney Cannon & Meyers, Ray J. (Elemental Technologies, American Fort, UT). SummitView 1.0: a code to automatically generate 3D solid models of surface micro-machining based MEMS designs., report, November 1, 2006; United States. (digital.library.unt.edu/ark:/67531/metadc887905/: accessed November 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.