ACCURACY LIMITATIONS IN LONG TRACE PROFILOMETRY.

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As requirements for surface slope error quality of grazing incidence optics approach the 100 nanoradian level, it is necessary to improve the performance of the measuring instruments to achieve accurate and repeatable results at this level. We have identified a number of internal error sources in the Long Trace Profiler (LTP) that affect measurement quality at this level. The LTP is sensitive to phase shifts produced within the millimeter diameter of the pencil beam probe by optical path irregularities with scale lengths of a fraction of a millimeter. We examine the effects of mirror surface ''macroroughness'' and internal glass homogeneity ... continued below

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TAKACS,P.Z. & QIAN,S. August 25, 2003.

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As requirements for surface slope error quality of grazing incidence optics approach the 100 nanoradian level, it is necessary to improve the performance of the measuring instruments to achieve accurate and repeatable results at this level. We have identified a number of internal error sources in the Long Trace Profiler (LTP) that affect measurement quality at this level. The LTP is sensitive to phase shifts produced within the millimeter diameter of the pencil beam probe by optical path irregularities with scale lengths of a fraction of a millimeter. We examine the effects of mirror surface ''macroroughness'' and internal glass homogeneity on the accuracy of the LTP through experiment and theoretical modeling. We will place limits on the allowable surface ''macroroughness'' and glass homogeneity required to achieve accurate measurements in the nanoradian range.

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  • 8TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION; SAN FRANCISCO, CA; 20030825 through 20030829

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  • Report No.: BNL--71101-2003-CP
  • Grant Number: DE-AC02-98CH10886
  • Office of Scientific & Technical Information Report Number: 913410
  • Archival Resource Key: ark:/67531/metadc886980

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  • August 25, 2003

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  • Sept. 22, 2016, 2:13 a.m.

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  • Nov. 17, 2016, 7:38 p.m.

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TAKACS,P.Z. & QIAN,S. ACCURACY LIMITATIONS IN LONG TRACE PROFILOMETRY., article, August 25, 2003; [Upton, New York]. (digital.library.unt.edu/ark:/67531/metadc886980/: accessed August 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.