The integration of advanced photonics and MEMS : LDRD 26519 final report.

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In this work we have demonstrated the fabrication of two different classes of devices which demonstrate the integration of simple MEMS structures with photonics structures. In the first class of device a suspended, movable Si waveguide was designed and fabricated. This waveguide was designed to be able to be actuated so that it could be brought into close proximity to a ring resonator or similar structure. In the course of this work we also designed a technique to improve the input coupling to the waveguide. While these structures were successfully fabricated, post fabrication and testing involved a significant amount of ... continued below

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25 p.

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Fleming, James Grant & Lin, Shawn-Yu December 1, 2003.

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Description

In this work we have demonstrated the fabrication of two different classes of devices which demonstrate the integration of simple MEMS structures with photonics structures. In the first class of device a suspended, movable Si waveguide was designed and fabricated. This waveguide was designed to be able to be actuated so that it could be brought into close proximity to a ring resonator or similar structure. In the course of this work we also designed a technique to improve the input coupling to the waveguide. While these structures were successfully fabricated, post fabrication and testing involved a significant amount of manipulation of the devices and due to their relatively flimsy nature our structures could not readily survive this extra handling. As a result we redesigned our devices so that instead of moving the waveguides themselves we moved a much smaller optical element into close proximity to the waveguides. Using this approach it was also possible to fabricate a much larger array of actively switched photonic devices: switches, ring resonators, couplers (which act as switches or splitters) and attenuators. We successfully fabricated all these structures and were able to successfully demonstrate splitters, switches and attenuators. The quality of the SiN waveguides fabricated in this work were found to be qualitatively compatible to those made using semiconductor materials.

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25 p.

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  • Report No.: SAND2003-4646
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/918267 | External Link
  • Office of Scientific & Technical Information Report Number: 918267
  • Archival Resource Key: ark:/67531/metadc886369

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • December 1, 2003

Added to The UNT Digital Library

  • Sept. 22, 2016, 2:13 a.m.

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  • Nov. 29, 2016, 4:08 p.m.

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Fleming, James Grant & Lin, Shawn-Yu. The integration of advanced photonics and MEMS : LDRD 26519 final report., report, December 1, 2003; United States. (digital.library.unt.edu/ark:/67531/metadc886369/: accessed April 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.