DESIGN AND USE OF A HIGH-ACCURACY NON-CONTACT ABSOLUTE THICKNESS MEASUREMENT MACHINE

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Many commercial metrology systems exist for making accurate surface form and roughness measurements of nominally planar parts. However, few metrology systems exist for making accurate absolute thickness measurements. At Lawrence Livermore National Laboratory there is an increasing need for absolute thickness measurements of mesoscale parts ranging in size from 1 mm to 25 mm in diameter and 2 {micro}m to 500 {micro}m thickness. The samples of interest in this case are nominally planar parts that require absolute thickness to be known to an accuracy of better than one micrometer. An Absolute Thickness Measurement Machine (ATMM) has been designed and constructed ... continued below

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Nederbragt, W.; Hibbard, R.; Kroll, J. & Kelly, D. July 27, 2005.

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Many commercial metrology systems exist for making accurate surface form and roughness measurements of nominally planar parts. However, few metrology systems exist for making accurate absolute thickness measurements. At Lawrence Livermore National Laboratory there is an increasing need for absolute thickness measurements of mesoscale parts ranging in size from 1 mm to 25 mm in diameter and 2 {micro}m to 500 {micro}m thickness. The samples of interest in this case are nominally planar parts that require absolute thickness to be known to an accuracy of better than one micrometer. An Absolute Thickness Measurement Machine (ATMM) has been designed and constructed to fulfill this requirement (see Figure 1). This article describes the design of the ATMM and the theory behind its operation including a detailed error budget. Other issues discussed involve errors associated with the sensors (non-linearity, and sensor resolution), development of the stepped thickness reference, thermal effects, and future upgrades. This research represents one of many issues involving meso-scale metrology currently under development at Lawrence Livermore National Laboratory.

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PDF-file: 6 pages; size: 0.6 Mbytes

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  • Presented at: American Society for Precision Engineering 2005 Annual Meeting, Norfolk, VA, United States, Oct 09 - Oct 14, 2005

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  • Report No.: UCRL-CONF-214228
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 881649
  • Archival Resource Key: ark:/67531/metadc886094

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • July 27, 2005

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  • Sept. 21, 2016, 2:29 a.m.

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  • Dec. 5, 2016, 1:55 p.m.

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Nederbragt, W.; Hibbard, R.; Kroll, J. & Kelly, D. DESIGN AND USE OF A HIGH-ACCURACY NON-CONTACT ABSOLUTE THICKNESS MEASUREMENT MACHINE, article, July 27, 2005; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc886094/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.