Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and IC Applications

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Electron tomograph tomography is a well y well-established technique for three-dimensional structure determination of (almost) amorphous specimens in life science applications. With the recent advances in nanotechnology and the semiconductor industry, there is also an increasing need for high-resolution 3D structural information in physical sciences. In this paper, we evaluate the capabilities and limitations of TEM and HAADF-STEM tomography for the 3D structural characterization of partially crystalline to highly crystalline materials. Our analysis of catalysts, a hydrogen storage material, and different semiconductor devices shows that features with a diameter as small as 1-2 nm can be resolved in 3D by ... continued below

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Kubel, C; Voigt, A; Schoenmakers, R; Otten, M; Su, D; Lee, T et al. November 9, 2005.

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Electron tomograph tomography is a well y well-established technique for three-dimensional structure determination of (almost) amorphous specimens in life science applications. With the recent advances in nanotechnology and the semiconductor industry, there is also an increasing need for high-resolution 3D structural information in physical sciences. In this paper, we evaluate the capabilities and limitations of TEM and HAADF-STEM tomography for the 3D structural characterization of partially crystalline to highly crystalline materials. Our analysis of catalysts, a hydrogen storage material, and different semiconductor devices shows that features with a diameter as small as 1-2 nm can be resolved in 3D by electron tomography. For partially crystalline materials with small single crystalline domains, TEM tomography provides reliable 3D structural information. HAADF-STEM tomography is more versatile and can also be used for high-resolution 3D imaging of highly crystalline materials such as semiconductor devices.

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PDF-file: 60 pages; size: 0 Kbytes

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  • Journal Name: Microscopy and Microanalysis; Journal Volume: 11; Journal Issue: 5

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  • Report No.: UCRL-JRNL-217035
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 888597
  • Archival Resource Key: ark:/67531/metadc885296

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  • November 9, 2005

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  • Sept. 21, 2016, 2:29 a.m.

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  • Dec. 7, 2016, 8:14 p.m.

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Kubel, C; Voigt, A; Schoenmakers, R; Otten, M; Su, D; Lee, T et al. Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and IC Applications, article, November 9, 2005; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc885296/: accessed September 26, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.