MEMS Actuated Deformable Mirror

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This ongoing work concerns the creation of a deformable mirror by the integration of MEMS actuators with Nanolaminate foils through metal compression boning. These mirrors will use the advantages of these disparate technologies to achieve dense actuation of a high-quality, continuous mirror surface. They will enable advanced adaptive optics systems in large terrestrial telescopes. While MEMS actuators provide very dense actuation with high precision they can not provide large forces typically necessary to deform conventional mirror surfaces. Nanolaminate foils can be fabricated with very high surface quality while their extraordinary mechanical properties enable very thin, flexible foils to survive the ... continued below

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Papavasiliou, A; Olivier, S; Barbee, T; Walton, C & Cohn, M November 10, 2005.

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This ongoing work concerns the creation of a deformable mirror by the integration of MEMS actuators with Nanolaminate foils through metal compression boning. These mirrors will use the advantages of these disparate technologies to achieve dense actuation of a high-quality, continuous mirror surface. They will enable advanced adaptive optics systems in large terrestrial telescopes. While MEMS actuators provide very dense actuation with high precision they can not provide large forces typically necessary to deform conventional mirror surfaces. Nanolaminate foils can be fabricated with very high surface quality while their extraordinary mechanical properties enable very thin, flexible foils to survive the rigors of fabrication. Precise metal compression bonding allows the attachment of the fragile MEMS actuators to the thin nanolaminate foils without creating distortions at the bond sites. This paper will describe work in four major areas: (1) modeling and design, (2) bonding development, (3) nanolaminate foil development, (4) producing a prototype. A first-principles analytical model was created and used to determine the design parameters. A method of bonding was determined that is both strong, and minimizes the localized deformation or print through. Work has also been done to produce nanolaminate foils that are sufficiently thin, flexible and flat to be deformed by the MEMS actuators. Finally a prototype was produced by bonding thin, flexible nanolaminate foils to commercially available MEMS actuators.

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PDF-file: 12 pages; size: 0 Kbytes

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  • Presented at: SPIE MOEMS-MEMS 2006, San Jose, CA, United States, Jan 21 - Jan 27, 2006

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  • Report No.: UCRL-CONF-217023
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 888610
  • Archival Resource Key: ark:/67531/metadc885067

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • November 10, 2005

Added to The UNT Digital Library

  • Sept. 21, 2016, 2:29 a.m.

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  • Nov. 29, 2016, 7:56 p.m.

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Papavasiliou, A; Olivier, S; Barbee, T; Walton, C & Cohn, M. MEMS Actuated Deformable Mirror, article, November 10, 2005; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc885067/: accessed August 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.