Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction

Thumbnail image of item number 1 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.
Thumbnail image of item number 2 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.
Thumbnail image of item number 3 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.
Thumbnail image of item number 4 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.

PDF Version Also Available for Download.

Description

The crystallographic orientations of individual grains in apassivated aluminum interconnect line of 0.7-mu m width were investigatedby using an incidentwhite x-ray microbeam at the Advanced Light Source,Berkeley National Laboratory. Intergrain orientation mapping was obtainedwith about 0.05o sensitivity by the micro Laue diffractiontechnique.

Creation Information

Chang, Chang-Hwan; Valek, B.C.; Padmore,H.A.; MacDowell, A.A.; Celestre, R.; Marieb, T. et al. July 1, 1999.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Authors

Sponsor

Publishers

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

About | Browse this Partner

Contact Us

Corrections Questions

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

The crystallographic orientations of individual grains in apassivated aluminum interconnect line of 0.7-mu m width were investigatedby using an incidentwhite x-ray microbeam at the Advanced Light Source,Berkeley National Laboratory. Intergrain orientation mapping was obtainedwith about 0.05o sensitivity by the micro Laue diffractiontechnique.

Source

  • X-Ray Microscopy 99, Berkeley, CA,08/01-7/1999

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Report No.: LBNL--44707
  • Report No.: LBNL/ALS--43569
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 903359
  • Archival Resource Key: ark:/67531/metadc883207

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

About | Browse this Collection

What responsibilities do I have when using this article?

Digital Files

When

Dates and time periods associated with this article.

Creation Date

  • July 1, 1999

Added to The UNT Digital Library

  • Sept. 22, 2016, 2:13 a.m.

Description Last Updated

  • Sept. 21, 2017, 3:51 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 2
Total Uses: 9
More Statistics

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

Thumbnail image of item number 1 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.
Thumbnail image of item number 2 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.
Thumbnail image of item number 3 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.
Thumbnail image of item number 4 in: 'Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction'.

PDF Version Also Available for Download.

Citations, Rights, Re-Use

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Chang, Chang-Hwan; Valek, B.C.; Padmore,H.A.; MacDowell, A.A.; Celestre, R.; Marieb, T. et al. Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction, article, July 1, 1999; (digital.library.unt.edu/ark:/67531/metadc883207/: accessed October 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.