A comparison of drive mechanisms for precision motion controlled stages

PDF Version Also Available for Download.

Description

This abstract presents a comparison of two drive mechanisms, a Rohlix{reg_sign} drive and a polymer nut drive, for precision motion controlled stages. A single-axis long-range stage with a 50 mm traverse combined with a short-range stage with a 16 {micro}m traverse at a operational bandwidth of 2.2 kHz were developed to evaluate the performance of the drives. The polymer nut and Rohlix{reg_sign} drives showed 4 nm RMS and 7 nm RMS positioning capabilities respectively, with traverses of 5 mm at a maximum velocity of 0.15 mm{sup -}s{sup -1} with the short range stage operating at a 2.2 kHz bandwidth. Further ... continued below

Physical Description

6 p. (0.1 MB)

Creation Information

Buice, E S; Yang, H; Otten, D; Smith, S T; Hocken, R J; Trumper, D L et al. March 22, 2006.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Publisher

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

This abstract presents a comparison of two drive mechanisms, a Rohlix{reg_sign} drive and a polymer nut drive, for precision motion controlled stages. A single-axis long-range stage with a 50 mm traverse combined with a short-range stage with a 16 {micro}m traverse at a operational bandwidth of 2.2 kHz were developed to evaluate the performance of the drives. The polymer nut and Rohlix{reg_sign} drives showed 4 nm RMS and 7 nm RMS positioning capabilities respectively, with traverses of 5 mm at a maximum velocity of 0.15 mm{sup -}s{sup -1} with the short range stage operating at a 2.2 kHz bandwidth. Further results will be presented in the subsequent sections.

Physical Description

6 p. (0.1 MB)

Notes

PDF-file: 6 pages; size: 0.1 Mbytes

Subjects

Source

  • Presented at: EUSPEN 6th International Conference, Baden, Austria, May 28 - Jun 01, 2006

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Report No.: UCRL-PROC-220191
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 894345
  • Archival Resource Key: ark:/67531/metadc879725

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this article?

When

Dates and time periods associated with this article.

Creation Date

  • March 22, 2006

Added to The UNT Digital Library

  • Sept. 22, 2016, 2:13 a.m.

Description Last Updated

  • April 13, 2017, 6:29 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 4

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Buice, E S; Yang, H; Otten, D; Smith, S T; Hocken, R J; Trumper, D L et al. A comparison of drive mechanisms for precision motion controlled stages, article, March 22, 2006; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc879725/: accessed December 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.