Ultrathin ta-C films on heads depositied by twist-filteredcathodic arc carbon plasmas

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It is known that filtered cathodic-arc-deposited ta-C films have outstanding properties even within the family of diamondlike materials. However, filtering of macroparticles is usually incomplete or accompanied by significant plasma losses. Ongoing research effort is directed towards the following goals: (1) complete elimination of macro- and nanoparticles from the vacuum arc plasma, (2) increase of plasma utilization in the cathodic-arc and macroparticle-filter system, (3) precise control and reproducibility of film deposition, and (4) synthesis of ultrathin films (< 5 nm) that meet requirements of the magnetic storage industry. The development of new filters, in particular the ''Twist Filter'', enables cathodic ... continued below

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Anders, Andre & Ryan, Francis W. July 14, 2000.

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It is known that filtered cathodic-arc-deposited ta-C films have outstanding properties even within the family of diamondlike materials. However, filtering of macroparticles is usually incomplete or accompanied by significant plasma losses. Ongoing research effort is directed towards the following goals: (1) complete elimination of macro- and nanoparticles from the vacuum arc plasma, (2) increase of plasma utilization in the cathodic-arc and macroparticle-filter system, (3) precise control and reproducibility of film deposition, and (4) synthesis of ultrathin films (< 5 nm) that meet requirements of the magnetic storage industry. The development of new filters, in particular the ''Twist Filter'', enables cathodic arc plasma deposition to synthesize ultrathin ta-C films of 3 nm on heads that pass corrosion and other relevant tests. We describe the Twist Filter system and report about recent ta-C tests results. In light of these results, even thinner films seem to be possible.

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  • Symposium on the Interface Tribology Towards 100Gbit/in2 and Beyond, Seattle, WA, October 1-4,2000

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  • Report No.: LBNL--45979
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 877606
  • Archival Resource Key: ark:/67531/metadc879433

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 14, 2000

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  • Sept. 21, 2016, 2:29 a.m.

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  • Sept. 30, 2016, 3:57 p.m.

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Anders, Andre & Ryan, Francis W. Ultrathin ta-C films on heads depositied by twist-filteredcathodic arc carbon plasmas, article, July 14, 2000; (digital.library.unt.edu/ark:/67531/metadc879433/: accessed January 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.